Inventor · disambiguated record

Willem Kalf

Also filed as: KALF WILLEM

1 granted patent·3 citations·filing 2008–2008

21Inventor score

Technology areasG03F

Files withKALF WILLEM1

Top patents by PatentIndex Score

1 record

0159US8125615B2Optical focus sensor, an inspection apparatus and a lithographic apparatusKALF WILLEM·Filed 2008·Granted Feb 28, 2012·3 cites·11 claims

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