Inventor
FANG ZIWEI
TW172 patents
⚠️ This page may combine multiple inventors who share the name “FANG ZIWEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
31 patentsUS10964792B1Mar 30, 2021
Dual metal capped via contact structures for semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD20 citations94
US10720431B1Jul 21, 2020
Methods of fabricating semiconductor devices having gate-all-around structure with oxygen blocking layers
TAIWAN SEMICONDUCTOR MFG CO LTD29 citations94
US9508556B1Nov 29, 2016
Method for fabricating fin field effect transistor and semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD31 citations94
US10008497B2Jun 26, 2018
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD13 citations93
US9634141B1Apr 25, 2017
Interlayer dielectric film in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD16 citations93
US11380772B2Jul 5, 2022
Gate structure and patterning method for multiple threshold voltages
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations86
US11183574B2Nov 23, 2021
Work function layers for transistor gate electrodes
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US11088034B2Aug 10, 2021
Gate structures for semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10854503B2Dec 1, 2020
Semiconductor structure with air gap and method sealing the air gap
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US10818768B1Oct 27, 2020
Method for forming metal cap layers to improve performance of semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US10770563B2Sep 8, 2020
Gate structure and patterning method for multiple threshold voltages
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10686074B2Jun 16, 2020
Fin field effect transistor (FinFET) device structure with doped region in source/drain structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations84
US10276691B2Apr 30, 2019
Conformal transfer doping method for fin-like field effect transistor
TAIWAN SEMICONDUCTOR MFG CO LTD11 citations84
US10249530B2Apr 2, 2019
Interlayer dielectric film in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US10049918B2Aug 14, 2018
Directional patterning methods
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US9812451B2Nov 7, 2017
Field effect transistor contact with reduced contact resistance
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US9722081B1Aug 1, 2017
FinFET device and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US9722083B2Aug 1, 2017
Source/drain junction formation
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations83
US11901242B2Feb 13, 2024
Gate structures for semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11862713B2Jan 2, 2024
Conformal transfer doping method for fin-like field effect transistor
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11626493B2Apr 11, 2023
Semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11594633B2Feb 28, 2023
Selective internal gate structure for ferroelectric semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11404416B2Aug 2, 2022
Low resistance fill metal layer material as stressor in metal gates
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11211244B2Dec 28, 2021
Ultraviolet radiation activated atomic layer deposition
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11195931B2Dec 7, 2021
Gate structure, semiconductor device and the method of forming semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11177259B2Nov 16, 2021
Multi-threshold gate structure with doped gate dielectric layer
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US11164796B2Nov 2, 2021
Method for forming semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11038029B2Jun 15, 2021
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11018256B2May 25, 2021
Selective internal gate structure for ferroelectric semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US11007005B2May 18, 2021
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10978357B2Apr 13, 2021
Semiconductor arrangement and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
VARIAN SEMICONDUCTOR EQUIPMENT
12 patentsUS6182604B1Feb 6, 2001
Hollow cathode for plasma doping system
VARIAN SEMICONDUCTOR EQUIPMENT133 citations98
US6335536B1Jan 1, 2002
Method and apparatus for low voltage plasma doping using dual pulses
VARIAN SEMICONDUCTOR EQUIPMENT101 citations97
US6300643B1Oct 9, 2001
Dose monitor for plasma doping system
VARIAN SEMICONDUCTOR EQUIPMENT60 citations94
US6527918B2Mar 4, 2003
Method and apparatus for low voltage plasma doping using dual pulses
VARIAN SEMICONDUCTOR EQUIPMENT23 citations92
US6500496B1Dec 31, 2002
Hollow cathode for plasma doping system
VARIAN SEMICONDUCTOR EQUIPMENT20 citations92
US7453059B2Nov 18, 2008
Technique for monitoring and controlling a plasma process
VARIAN SEMICONDUCTOR EQUIPMENT21 citations91
US6528805B2Mar 4, 2003
Dose monitor for plasma doping system
VARIAN SEMICONDUCTOR EQUIPMENT17 citations91
US7397048B2Jul 8, 2008
Technique for boron implantation
VARIAN SEMICONDUCTOR EQUIPMENT23 citations89
US7396746B2Jul 8, 2008
Methods for stable and repeatable ion implantation
VARIAN SEMICONDUCTOR EQUIPMENT39 citations87
US7476849B2Jan 13, 2009
Technique for monitoring and controlling a plasma process
VARIAN SEMICONDUCTOR EQUIPMENT10 citations83
US7878145B2Feb 1, 2011
Monitoring plasma ion implantation systems for fault detection and process control
VARIAN SEMICONDUCTOR EQUIPMENT7 citations80
US7528389B2May 5, 2009
Profile adjustment in plasma ion implanter
VARIAN SEMICONDUCTOR EQUIPMENT8 citations80
TAIWAN SEMICONDUCTOR MFG
3 patentsUS8853025B2Oct 7, 2014
FinFET/tri-gate channel doping for multiple threshold voltage tuning
TAIWAN SEMICONDUCTOR MFG507 citations99
US8927377B2Jan 6, 2015
Methods for forming FinFETs with self-aligned source/drain
TAIWAN SEMICONDUCTOR MFG8 citations84
US8809171B2Aug 19, 2014
Methods for forming FinFETs having multiple threshold voltages
TAIWAN SEMICONDUCTOR MFG9 citations84
FANG ZIWEI
2 patentsHUANG YU-LIEN
1 patentENGLAND JONATHAN GERALD
1 patentShowing the top 50 of 172 patents by PatentIndex Score.