Inventor · disambiguated record
Allan L. Sagle
Also filed as: SAGLE ALLAN L
4 granted patents·1 pending application·105 citations·filing 1999–2007
79Inventor score
Top patents by PatentIndex Score
5 records- 0191US6724002B2Multiple electron beam lithography system with multiple beam modulated laser illuminationAPPLIED MATERIALS INC·Filed 2002·Granted Apr 20, 2004·41 cites·12 claims
- 0277US6262429B1Raster shaped beam, electron beam exposure strategy using a two dimensional multipixel flash fieldETEC SYSTEMS INC·Filed 1999·Granted Jul 17, 2001·35 cites·30 claims
- 0373US7961912B2Method and apparatus for dynamic space-time imaging systemSTEVICK GLEN R·Filed 2007·Granted Jun 14, 2011·17 cites·28 claims
- 0455US6326635B1Minimization of electron fogging in electron beam lithographyETEC SYSTEMS INC·Filed 1999·Granted Dec 4, 2001·12 cites·14 claims
- 0530US2002104970A1Raster shaped beam, electron beam exposure strategy using a two dimensional multipixel flash fieldFiled 2001·Application pending·0 cites
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