Inventor
TRUE EMILY
US6 patents
⚠️ This page may combine multiple inventors who share the name “TRUE EMILY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULTRATECH INC
4 patentsUS7751067B1Jul 6, 2010
Substrate-alignment using detector of substrate material
ULTRATECH INC19 citations90
US7528937B1May 5, 2009
Dual-sided substrate measurement apparatus and methods
ULTRATECH INC14 citations87
US8017424B2Sep 13, 2011
Dual-sided substrate measurement apparatus and methods
ULTRATECH INC3 citations57
US7902040B1Mar 8, 2011
Dual-sided substrate measurement apparatus and methods
ULTRATECH INC0 citations46