Inventor
SHEN ZEQING
US14 patents
Patents
14 patentsUS11545354B2Jan 3, 2023
Molecular layer deposition method and system
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US11990369B2May 21, 2024
Selective patterning with molecular layer deposition
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US11830729B2Nov 28, 2023
Low-k boron carbonitride films
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US11756785B2Sep 12, 2023
Molecular layer deposition contact landing protection for 3D NAND
APPLIED MATERIALS INC0 citations62
US11732352B2Aug 22, 2023
Hydrogen free silicon dioxide
APPLIED MATERIALS INC0 citations62
US11355354B1Jun 7, 2022
Thermal deposition of doped silicon oxide
APPLIED MATERIALS INC0 citations62
US11972940B2Apr 30, 2024
Area selective carbon-based film deposition
APPLIED MATERIALS INC1 citations61
US11655537B2May 23, 2023
HDP sacrificial carbon gapfill
APPLIED MATERIALS INC0 citations61
US11658026B2May 23, 2023
Conformal silicon oxide film deposition
APPLIED MATERIALS INC0 citations61
US11626278B2Apr 11, 2023
Catalytic formation of boron and carbon films
APPLIED MATERIALS INC0 citations61
US12438050B2Oct 7, 2025
Electronic device fabrication using area-selective deposition
APPLIED MATERIALS INC0 citations60
US12027374B2Jul 2, 2024
Processes to deposit amorphous-silicon etch protection liner
APPLIED MATERIALS INC0 citations60
US11276573B2Mar 15, 2022
Methods of forming high boron-content hard mask materials
APPLIED MATERIALS INC0 citations58
US11682554B2Jun 20, 2023
Catalytic thermal deposition of carbon-containing materials
APPLIED MATERIALS INC0 citations51