Inventor
MATSUNAGA TATSUHISA
JP9 patents
⚠️ This page may combine multiple inventors who share the name “MATSUNAGA TATSUHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
7 patentsUS7198447B2Apr 3, 2007
Semiconductor device producing apparatus and producing method of semiconductor device
HITACHI INT ELECTRIC INC462 citations97
US6540469B2Apr 1, 2003
Substrate processing apparatus
HITACHI INT ELECTRIC INC475 citations97
US6641350B2Nov 4, 2003
Dual loading port semiconductor processing equipment
HITACHI INT ELECTRIC INC69 citations94
US6737613B2May 18, 2004
Heat treatment apparatus and method for processing substrates
HITACHI INT ELECTRIC INC21 citations92
US6638860B2Oct 28, 2003
Method and apparatus for processing substrates and method for manufacturing a semiconductor device
HITACHI INT ELECTRIC INC14 citations82
US6658321B2Dec 2, 2003
Substrate processing method and apparatus
HITACHI INT ELECTRIC INC9 citations72
US6927165B2Aug 9, 2005
Method and apparatus for processing substrates and method for manufacturing a semiconductor device
HITACHI INT ELECTRIC INC4 citations60