Dual loading port semiconductor processing equipment

Abstract

A substrate processing equipment comprises two pod supporting stages and two independently operable pod door openers. Each pod supporting stage is capable of placing thereon a pod for containing substrates therein. Each pod door openers having means for permitting access to the substrates inside the pod placed on a corresponding pod supporting stage.

1. A substrate processing equipment comprising:
 at least two pod supporting stages, each for placing thereon a pod for containing substrates therein, the pod having a door; 
 at least two independently operable pod doors opening mechanisms, each for permitting access to substrates inside the pod placed on a corresponding one of the pod supporting stages; and 
 wherein each of the pod door opening mechanisms horizontally removes the door from the corresponding pod to thereby allow substrates disposed inside of the corresponding pod to be unloaded therefrom. 
 
     
     
       2. The substrate processing equipment of  claim 1 , wherein the at least two pod supporting stages are vertically arranged. 
     
     
       3. The substrate processing equipment of  claim 1 , wherein each of the pod supporting stages includes a mapping apparatus for detecting locations of the substrates in the pod placed thereon. 
     
     
       4. The substrate processing equipment of  claim 3 , wherein the mapping apparatus moves between a mapping position at which a mapping process is carried out and a standby position located away from a pod entrance of the corresponding pod to allow a substrate loading or unloading process to be carried out through the pod entrance. 
     
     
       5. The substrate processing equipment of  claim 1 , further comprising:
 a substrate handling apparatus for loading substrates to a pod or unloading substrates from a pod placed on one of the pod supporting stages; and 
 a pod transferring apparatus for placing another pod on the other pod supporting stage while the substrate handling apparatus loads substrates to the pod or unloads substrates from the pod placed on said one of the pod supporting stages. 
 
     
     
       6. The substrate processing equipment of  claim 1 , wherein each pod door opening mechanism moves the door of the pod between a position where the door of the pod is closed and a retreated position where the corresponding pod is completely opened. 
     
     
       7. A substrate processing equipment comprising:
 at least one two pod door doors opening mechanism for permitting access to substrates disposed inside a pod having a door; 
 wherein each of the pod door opening mechanism moves the door of the pod horizontally from a position where the door of the pod is closed to a retreated position where the pod is completely open thereby allowing substrates to be unloaded from the pod. 
 
     
     
       8. A substrate processing equipment comprising:
 a pod supporting stage for placing thereon a pod for containing substrates therein, the pod having an opening; 
 a mapping apparatus mounted on the pod supporting stage for detecting the locations of substrates in the pod placed on the pod supporting stage through the opening of the pod; 
 a substrate handling apparatus for unloading substrates from the pod placed on the pod supporting stage through the opening of the pod; and 
 wherein the mapping apparatus pivotally moves between a mapping position at which a mapping process is carried out and a standby position located away from the opening of the pod to allow a substrates unloading process to be carried out through the opening. 
 
     
     
       9. A substrate processing method for use in a substrate processing equipment including at least two pod supporting stages, each for placing thereon a pod for containing substrates therein, the pod having a door, the method comprising the steps of:
 (a) placing a first pod on one pod supporting stage; 
 (b) opening a door of the first pod only independently of a door of a second pod in substantially horizontal directions; 
 (c) loading or unloading substrates to or from the first pod; and 
 (d) placing a the second pod on another pod supporting stage during the loading or unloading step (c). 
 
     
     
       10. A substrate processing equipment comprising:
 at least two pod supporting stages, each for placing thereon a pod for containing a plurality of substrates therein, the pod having an opening for loading and unloading the substrates and a door for opening and closing the opening of the pod wherein at least two substrate loading ports for loading and unloading the plurality of substrates out of the opening of the pod are disposed vertically; and   at least two pod doors opening mechanisms, each for opening and closing the opening of the pod containing closures smaller than width in the vertical direction in the door at intervals in the vertical direction and horizontal guide rails which are parallel with the opening of the pod, provided at substrate loading ports, each for permitting access to substrates inside the pod placed on a corresponding one of the pod supporting stages,   wherein each of the closures moves the door horizontally with the opening of the opening of the pod in horizontal same direction independently by guide rails and the each of the closure moves the door horizontally with the opening of the closing of the pod in horizontal same direction independently by guide rails, such that each of the pod door opening mechanisms horizontally removes the door from the corresponding pod to thereby allow substrates disposed inside of the corresponding pod to be unloaded therefrom.   
     
     
       11. The substrate processing equipment of claim 10, further comprising:
 an air cylinder for reciprocally operating the closure horizontally and in parallel with the opening of the pod, which are provided at each of the substrate loading ports.   
     
     
       12. The substrate processing equipment of claim 10, wherein each of the substrate loading ports includes a mapping apparatus for detecting locations of the substrates in the pod placed thereon. 
     
     
       13. The substrate processing equipment of claim 12, wherein the mapping apparatus moves between a mapping position at which a mapping process is carried out and a standby position located away from a pod entrance of the corresponding pod to allow a substrate loading or unloading process to be carried out through the pod entrance. 
     
     
       14. The substrate processing equipment of claim 10, further comprising:
 a substrate handling apparatus for loading substrates to a pod or unloading substrates from a pod placed on one of the pod supporting stages; and   a pod transferring apparatus for placing another pod on the other pod supporting stage while the substrate handling apparatus loads substrates to the pod or unloads substrates from the pod places on said one of the pod supporting stages.   
     
     
       15. The substrates processing equipment of claim 10, wherein each pod door opening mechanism moves the door of the pod between a position where the door of the pod is closed and a retreated position where the corresponding pod is completely opened. 
     
     
       16. A substrate processing method for use in a substrate processing equipment including at least two pod supporting stages, each for placing thereon a pod for containing a plurality of substrates therein, the pod having an opening for loading and unloading the substrates and a door, for opening and closing the opening of the pod wherein at least two substrate loading ports for loading and unloading the plurality of substrates out of the opening of the pod are disposed vertically smaller than width in the vertical direction in the door at intervals in the vertical direction,
 at least two pod doors opening mechanisms, each for opening and closing the opening of the pod containing closures smaller than width in the vertical direction in the door at intervals in the vertical direction and horizontal guide rails which are parallel with the opening of the pod, provided at substrate loading ports, each for permitting access to substrates inside the pod placed on a corresponding one of the pod supporting stages, the method comprising the steps of:
 (a) placing a first pod on one pod supporting stage; 
 (b) opening a door of the first pod only in substantially the first horizontal direction and in parallel with the opening of the pod by a first closure and a first guide rail; 
 (c) loading or unloading substrates to or from the first pod; and 
 (d) placing a second pod on another pod supporting stage during the loading or unloading step (c), 
   wherein the another pod door opening mechanism moves the door of the second pod the first horizontal direction and in parallel with the opening of the pod by a second closure and a second guide rail.   
     
     
       17. A substrate processing method for use in a substrate processing equipment including at least two pod supporting stages, each for placing thereon a pod for containing substrates therein, the pod having a door, the method comprising the steps of:
 (a) placing a first pod on one pod supporting stage;   (b) opening a door of the first pod only in substantially horizontal directions;   (c) loading or unloading substrates to or from the first pod;   (d) placing a second pod on another pod supporting stage during the loading or unloading step (c); and   (e) opening a door of the second pod from a position where the door of the second pod is closed to a retreated position where the second pod is open thereby allowing substrates to be loaded or be unloaded from the second pod during the loading or unloading step (c).   
     
     
       18. A substrate processing method for use in a substrate processing equipment including at least two pod supporting stages, each for placing thereon a pod for containing substrates therein, the pod having a door, the method comprising the steps of:
 (a) placing a first pod on one pod supporting stage;   (b) opening a door of the first pod only in substantially horizontal directions;   (c) loading or unloading substrates to or from the first pod;   (d) placing a second pod on another pod supporting stage during the loading or unloading step (c);   (e) opening a door of the second pod during the loading or unloading step (c);   (f) loading or unloading substrates to or from the second pod; and   (g) closing the door of the first pod in substantially horizontal directions during the loading or unloading step (f).   
     
     
       19. A substrate processing method for use in a substrate processing equipment including at least two pod supporting stages, each for placing thereon a pod for containing substrates therein, the pod having a door, the method comprising the steps of:
 (a) placing a first pod on one pod supporting stage;   (b) opening a door of the first pod only in substantially horizontal directions;   (c) loading or unloading substrates to or from the first pod;   (d) placing a second pod on another pod supporting stage during the loading or unloading step (c);   (e) opening a door of the second pod during the loading or unloading step (c); and   (f) detecting a position of the substrate in the second pod during the loading or unloading step (c).   
     
     
       20. The substrate processing method for use in a substrate processing equipment according to claim 17, wherein each of said at least two pod supporting stages is disposed vertically, the method further comprising: opening the door of the first pod in substantially horizontal and in parallel with the opening of the first pod in step (b); and opening the door of the second pod in substantially horizontal and in parallel with the opening of the second pod in step (e).