Inventor · disambiguated record
Tatsuhisa Matsunaga
Also filed as: MATSUNAGA TATSUHISA
9 granted patents·5 pending applications·1,500 citations·filing 1992–2010
92Inventor score
Top patents by PatentIndex Score
14 records- 0197US6540469B2Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2001·Granted Apr 1, 2003·475 cites·12 claims
- 0296US7198447B2Semiconductor device producing apparatus and producing method of semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2003·Granted Apr 3, 2007·462 cites·11 claims
- 0395USRE43023EDual loading port semiconductor processing equipmentNAKASHIMA TAKANOBU·Filed 2010·Granted Dec 13, 2011·417 cites·20 claims
- 0492US6641350B2Dual loading port semiconductor processing equipmentHITACHI INT ELECTRIC INC·Filed 2001·Granted Nov 4, 2003·69 cites·9 claims
- 0577US6737613B2Heat treatment apparatus and method for processing substratesHITACHI INT ELECTRIC INC·Filed 2003·Granted May 18, 2004·21 cites·8 claims
- 0671US6638860B2Method and apparatus for processing substrates and method for manufacturing a semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2001·Granted Oct 28, 2003·14 cites·19 claims
- 0765US5371931AProduction system for molded and pressed partsHITACHI LTD·Filed 1992·Granted Dec 13, 1994·29 cites·10 claims
- 0862US6658321B2Substrate processing method and apparatusHITACHI INT ELECTRIC INC·Filed 2001·Granted Dec 2, 2003·9 cites·8 claims
- 0954US6927165B2Method and apparatus for processing substrates and method for manufacturing a semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2003·Granted Aug 9, 2005·4 cites·17 claims
- 1038US2003053893A1Substrate processing apparatus and a method for fabricating a semiconductor device by using sameHITACHI INT ELECTRIC INC·Filed 2002·Application pending·0 cites
- 1136US2002124960A1Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2002·Application pending·0 cites
- 1236US2003077150A1Substrate processing apparatus and a method for fabricating a semiconductor device by using sameHITACHI INT ELECTRIC INC·Filed 2002·Application pending·0 cites
- 1335US2002182870A1Substrate processing apparatus and a method for fabricating a semiconductor device by using sameHITACHI INT ELECTRIC INC·Filed 2002·Application pending·0 cites
- 1433US2003000476A1Substrate processing apparatus, conveying unit thereof, and semiconductor device fabricating MethodHITACHI INT ELECTRIC INC·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →