Inventor · disambiguated record
Sahng Kyoo Lee
Also filed as: LEE SAHNG K · LEE SAHNG KYOO
8 granted patents·5 pending applications·303 citations·filing 1995–2007
87Inventor score
Top patents by PatentIndex Score
13 records- 0194US5953622AMethod for fabricating semiconductor wafersHYUNDAI ELECTRONICS IND·Filed 1997·Granted Sep 14, 1999·205 cites·20 claims
- 0288US6261911B1Method of manufacturing a junction in a semiconductor deviceHYUNDAI ELECTRONICS IND·Filed 2000·Granted Jul 17, 2001·46 cites·16 claims
- 0381US7842606B2Method of depositing thin film and method of manufacturing semiconductor using the sameINTEGRATED PROCESS SYSTEMS LTD·Filed 2005·Granted Nov 30, 2010·10 cites·11 claims
- 0469US7253101B2Deposition method of TiN thin film having a multi-layer structureIPS LTD·Filed 2005·Granted Aug 7, 2007·3 cites·37 claims
- 0560US7785664B2Method of depositing thin filmIPS LTD·Filed 2005·Granted Aug 31, 2010·1 cites·23 claims
- 0660US5880039AMethod for forming interlayer insulating film of a semiconductor deviceHYUNDAI ELECTRONICS IND·Filed 1997·Granted Mar 9, 1999·27 cites·20 claims
- 0746US2007193515A1Apparatus for generating remote plasmaUNIV SOGANG IND UNIV COOP FOUN·Filed 2007·Application pending·0 cites
- 0846US2006210712A1Method of depositing thin film on substrate using impulse ALD processPARK YOUNG H·Filed 2006·Application pending·0 cites
- 0945US6255206B1Method of forming gate electrode with titanium polycide structureHYUNDAI ELECTRONICS IND·Filed 1999·Granted Jul 3, 2001·11 cites·7 claims
- 1045US2006096534A1Apparatus for depositing thin film on waferLIM HONG J·Filed 2005·Application pending·0 cites
- 1137US2005003088A1Method of depositing thin film on waferFiled 2004·Application pending·0 cites
- 1233US2007026144A1Method of depositing thin film on waferPARK YOUNG H·Filed 2004·Application pending·0 cites
- 1328US5707686AMethod for preventing moisture from being absorbed into impurity-contained insulating layerHYUNDAI ELECTRONICS IND·Filed 1995·Granted Jan 13, 1998·0 cites·3 claims
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