Inventor · disambiguated record
Kyung-Seuk Hwang
Also filed as: HWANG KYUNG-SEUK
8 granted patents·4 pending applications·254 citations·filing 1996–2007
89Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD11
Top patents by PatentIndex Score
12 records- 0186US6232228B1Method of manufacturing semiconductor devices, etching composition for manufacturing semiconductor devices, and semiconductor devices made using the methodSAMSUNG ELECTRONICS CO LTD·Filed 1999·Granted May 15, 2001·77 cites·28 claims
- 0278US6436809B1Method of manufacturing semiconductor devices, etching compositions for manufacturing semiconductor devices, and semiconductor devices made using this methodSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Aug 20, 2002·19 cites·13 claims
- 0374US6200414B1Circulation system for supplying chemical for manufacturing semiconductor devices and circulating method thereofSAMSUNG ELECTRONICS CO LTD·Filed 1999·Granted Mar 13, 2001·49 cites·11 claims
- 0474US6197150B1Apparatus for wafer treatment for the manufacture of semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 1999·Granted Mar 6, 2001·44 cites·19 claims
- 0569US6140233AMethod of manufacturing semiconductor devices, etching compositions for manufacturing semiconductor devices, and semiconductor devices therebySAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Oct 31, 2000·32 cites·32 claims
- 0653US5901716AWafer cleaning apparatus with rotating cleaning solution injection nozzlesSAMSUNG ELECTRONICS CO LTD·Filed 1996·Granted May 11, 1999·20 cites·7 claims
- 0744US6742281B2Apparatus for drying semiconductor wafer using vapor dry methodSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Jun 1, 2004·2 cites·19 claims
- 0844US6232239B1Method for cleaning contact holes in a semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted May 15, 2001·11 cites·28 claims
- 0938US2001006246A1Method of manufacturing semiconductor devices, etching composition for manufacturing semiconductor devices, and semiconductor devices made using the methodFiled 2001·Application pending·0 cites
- 1037US2008041430A1Cleaning solution spraying unit and wafer cleaning apparatus with the sameSAMSUNG ELECTRONICS CO LTD·Filed 2007·Application pending·0 cites
- 1135US2006130871A1Megasonic cleaner having double cleaning probe and cleaning methodSAMSUNG ELECTRONICS CO LTD·Filed 2005·Application pending·0 cites
- 1232US2007157957A1Substrate transfer robot and apparatus having the substrate transfer robot for cleaning a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2007·Application pending·0 cites
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