Inventor
URANO FUMIYOSHI
JP26 patents
⚠️ This page may combine multiple inventors who share the name “URANO FUMIYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WAKO PURE CHEM IND LTD
23 patentsUS5350660ASep 27, 1994
Chemical amplified resist material containing photosensitive compound capable of generating an acid and specific polystyrene copolymer having functional groups that become alkali-soluble under an acid atmosphere
WAKO PURE CHEM IND LTD210 citations98
US6723483B1Apr 20, 2004
Sulfonium salt compounds
WAKO PURE CHEM IND LTD65 citations95
US5670299ASep 23, 1997
Pattern formation process
WAKO PURE CHEM IND LTD47 citations95
US5558976ASep 24, 1996
Pattern formation method
WAKO PURE CHEM IND LTD67 citations95
US5468589ANov 21, 1995
Resist material and pattern formation process
WAKO PURE CHEM IND LTD72 citations95
US5558971ASep 24, 1996
Resist material
WAKO PURE CHEM IND LTD79 citations94
US7312014B2Dec 25, 2007
Resist compositions
WAKO PURE CHEM IND LTD40 citations92
US6033826AMar 7, 2000
Polymer and resist material
WAKO PURE CHEM IND LTD33 citations92
US5976759ANov 2, 1999
Polymer composition and resist material
WAKO PURE CHEM IND LTD44 citations92
US5780206AJul 14, 1998
Fine pattern forming process using a resist composition sensitive to deep ultraviolet light
WAKO PURE CHEM IND LTD38 citations92
US5695910ADec 9, 1997
Resist composition for deep ultraviolet light
WAKO PURE CHEM IND LTD44 citations92
US5677112AOct 14, 1997
Process for forming a pattern on a semiconductor substrate using a deep ultraviolet absorbent composition
WAKO PURE CHEM IND LTD44 citations92
US5627006AMay 6, 1997
Resist material
WAKO PURE CHEM IND LTD22 citations92
US5576359ANov 19, 1996
Deep ultraviolet absorbent composition
WAKO PURE CHEM IND LTD23 citations92
US5498748AMar 12, 1996
Anthracene derivatives
WAKO PURE CHEM IND LTD23 citations92
US5216135AJun 1, 1993
Diazodisulfones
WAKO PURE CHEM IND LTD25 citations92
US4574156AMar 4, 1986
Polymethoxybenzyl piperazine derivatives effective for improving blood circulation system
WAKO PURE CHEM IND LTD25 citations78
US6586152B1Jul 1, 2003
Agent for reducing substrate dependence
WAKO PURE CHEM IND LTD14 citations77
US5973094AOct 26, 1999
Functional polymers
WAKO PURE CHEM IND LTD2 citations62
US5128062AJul 7, 1992
Optically active compounds and liquid crystal compositions containing such compounds
WAKO PURE CHEM IND LTD4 citations61
USRE40211EApr 1, 2008
Diazodisulfones
WAKO PURE CHEM IND LTD0 citations51
US5114615AMay 19, 1992
Liquid crystal compounds and intermediates thereof
WAKO PURE CHEM IND LTD1 citations50
US7374857B2May 20, 2008
Bismide compound, acid generator and resist composition each containing the same, and method of forming pattern from the composition
WAKO PURE CHEM IND LTD0 citations42
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
2 patentsUS5389491AFeb 14, 1995
Negative working resist composition
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD24 citations92
US5272036ADec 21, 1993
Pattern forming contrast enhanced material utilizing water soluble photosensitive diazo compound and pattern forming method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD18 citations73