P

Inventor

IZUMI AKIRA

JP46 patents
⚠️ This page may combine multiple inventors who share the name “IZUMI AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DAINIPPON SCREEN MFG

20 patents
US5916366AJun 29, 1999

Substrate spin treating apparatus

DAINIPPON SCREEN MFG130 citations98
US5022961AJun 11, 1991

Method for removing a film on a silicon layer surface

DAINIPPON SCREEN MFG452 citations98
US6077321AJun 20, 2000

Wet/dry substrate processing apparatus

DAINIPPON SCREEN MFG73 citations96
US5927303AJul 27, 1999

Substrate processing apparatus

DAINIPPON SCREEN MFG79 citations96
US5571375ANov 5, 1996

Method of removing native oxide film from a contact hole on silicon wafer

DAINIPPON SCREEN MFG52 citations94
US7584760B2Sep 8, 2009

Substrate processing apparatus

DAINIPPON SCREEN MFG29 citations92
US7524771B2Apr 28, 2009

Substrate processing method using alkaline solution and acid solution

DAINIPPON SCREEN MFG20 citations92
US7182821B2Feb 27, 2007

Substrate processing method and substrate processing apparatus

DAINIPPON SCREEN MFG37 citations92
US7017281B2Mar 28, 2006

Substrate processing apparatus and substrate processing method drying substrate by spraying gas

DAINIPPON SCREEN MFG22 citations92
US6669808B2Dec 30, 2003

Substrate processing apparatus and substrate processing method

DAINIPPON SCREEN MFG37 citations92
US6446646B1Sep 10, 2002

Substrate processing apparatus

DAINIPPON SCREEN MFG29 citations92
US5927306AJul 27, 1999

Ultrasonic vibrator, ultrasonic cleaning nozzle, ultrasonic cleaning device, substrate cleaning device, substrate cleaning treatment system and ultrasonic cleaning nozzle manufacturing method

DAINIPPON SCREEN MFG61 citations91
US5112437AMay 12, 1992

Oxide film removing apparatus and removing method thereof using azeotropic vapor mixture

DAINIPPON SCREEN MFG38 citations90
US7811412B2Oct 12, 2010

Substrate processing apparatus and substrate processing method drying substrate

DAINIPPON SCREEN MFG11 citations84
US8029622B2Oct 4, 2011

Substrate processing apparatus, liquid film freezing method and substrate processing method

DAINIPPON SCREEN MFG9 citations83
US9431276B2Aug 30, 2016

Substrate processing apparatus and substrate processing method

DAINIPPON SCREEN MFG4 citations73
US7942976B2May 17, 2011

Substrate processing apparatus and substrate processing method

DAINIPPON SCREEN MFG5 citations63
US7867337B2Jan 11, 2011

Substrate processing method and substrate processing apparatus

DAINIPPON SCREEN MFG4 citations63
US7617833B2Nov 17, 2009

Apparatus and method for performing predetermined processing on substrate with ultrasonic waves

DAINIPPON SCREEN MFG1 citations52
US5520857AMay 28, 1996

Liquid agent evaporator

DAINIPPON SCREEN MFG1 citations46

CITIZEN WATCH CO LTD

4 patents

TOYODA AUTOMATIC LOOM WORKS

3 patents

NIKON CORP

3 patents

MATSUMURA HIDEKI

2 patents

MIYA KATSUHIKO

2 patents

CITIZEN HOLDINGS CO LTD

2 patents

KYUSHU INST TECHNOLOGY

2 patents

HIDEKI MATSUMRA

1 patent

MITSUBISHI ELECTRIC CORP

1 patent

MITSUI CHEMICALS INC

1 patent

FUJITSU LTD

1 patent

JAPAN TOBACCO INC

1 patent

TOYOTA MOTOR CO LTD

1 patent

SHINETSU CHEMICAL CO

1 patent

SETO HIDEYUKI

1 patent