Inventor · disambiguated record
Keiji Kitagaito
Also filed as: KITAGAITO KEIJI
5 granted patents·12 citations·filing 2014–2022
75Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0189US11355352B2Plasma etching method and plasma etching apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jun 7, 2022·2 cites·11 claims
- 0285US10163653B2Plasma etching method and plasma etching apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Dec 25, 2018·5 cites·8 claims
- 0382US10707091B2Plasma etching method and plasma etching apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jul 7, 2020·2 cites·8 claims
- 0479US9396962B2Etching methodTOKYO ELECTRON LTD·Filed 2015·Granted Jul 19, 2016·3 cites·3 claims
- 0577US12062522B2Plasma etching method and plasma etching apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Aug 13, 2024·0 cites·12 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →