Inventor · disambiguated record
Steven C. Hays
Also filed as: HAYS STEVEN · HAYS STEVEN C
2 granted patents·2 pending applications·31 citations·filing 2006–2012
63Inventor score
Technology areasH01J
Top patents by PatentIndex Score
4 records- 0191US8502173B2System and method for ion implantation with improved productivity and uniformityAXCELIS TECH INC·Filed 2012·Granted Aug 6, 2013·17 cites·38 claims
- 0288US8278634B2System and method for ion implantation with improved productivity and uniformityVANDERBERG BO H·Filed 2010·Granted Oct 2, 2012·14 cites·33 claims
- 0347US2008099696A1Shaped apertures in an ion implanterAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 0446US2008169435A1Ion beam monitoring arrangementAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →