Inventor
FINAROV MOSHE
IL87 patents
⚠️ This page may combine multiple inventors who share the name “FINAROV MOSHE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVA MEASURING INSTR LTD
46 patentsUS6974962B2Dec 13, 2005
Lateral shift measurement using an optical technique
NOVA MEASURING INSTR LTD120 citations99
US6657736B1Dec 2, 2003
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD178 citations99
US5604344AFeb 18, 1997
Autofocussing microscope having a pattern imaging system
NOVA MEASURING INSTR LTD269 citations99
US5517312AMay 14, 1996
Device for measuring the thickness of thin films
NOVA MEASURING INSTR LTD162 citations99
US6166801ADec 26, 2000
Monitoring apparatus and method particularly useful in photolithographically processing substrates
NOVA MEASURING INSTR LTD154 citations98
US6100985AAug 8, 2000
Method and apparatus for measurements of patterned structures
NOVA MEASURING INSTR LTD107 citations98
US6038029AMar 14, 2000
Method and apparatus for alignment of a wafer
NOVA MEASURING INSTR LTD95 citations98
US5764365AJun 9, 1998
Two-dimensional beam deflector
NOVA MEASURING INSTR LTD106 citations98
US7477405B2Jan 13, 2009
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD25 citations96
US6603529B1Aug 5, 2003
Monitoring apparatus and method particularly useful in photolithographically processing substrates
NOVA MEASURING INSTR LTD48 citations96
US6426502B1Jul 30, 2002
Apparatus for integrated monitoring of wafers and for process control in the semiconductor manufacturing and a method for use thereof
NOVA MEASURING INSTR LTD63 citations96
US6424417B1Jul 23, 2002
Method and system for controlling the photolithography process
NOVA MEASURING INSTR LTD68 citations96
US6281974B1Aug 28, 2001
Method and apparatus for measurements of patterned structures
NOVA MEASURING INSTR LTD55 citations96
US6842220B1Jan 11, 2005
Monitoring apparatus and method particularly useful in photolithographically processing substrates
NOVA MEASURING INSTR LTD24 citations95
US6292265B1Sep 18, 2001
Method and apparatus for monitoring a chemical mechanical planarization process applied to metal-based patterned objects
NOVA MEASURING INSTR LTD56 citations95
US7760368B2Jul 20, 2010
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD10 citations93
US7626710B2Dec 1, 2009
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD8 citations93
US7495782B2Feb 24, 2009
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD12 citations93
US7195540B2Mar 27, 2007
Method and system for endpoint detection
NOVA MEASURING INSTR LTD14 citations93
US7019850B2Mar 28, 2006
Method and system for thin film characterization
NOVA MEASURING INSTR LTD27 citations93
US6791686B1Sep 14, 2004
Apparatus for integrated monitoring of wafers and for process control in the semiconductor manufacturing and a method for use thereof
NOVA MEASURING INSTR LTD22 citations93
US6764379B2Jul 20, 2004
Method and system for endpoint detection
NOVA MEASURING INSTR LTD27 citations93
US6650424B2Nov 18, 2003
Method and system for measuring in patterned structures
NOVA MEASURING INSTR LTD43 citations93
USRE38153EJun 24, 2003
Two-dimensional beam deflector
NOVA MEASURING INSTR LTD23 citations93
US5957749ASep 28, 1999
Apparatus for optical inspection of wafers during polishing
NOVA MEASURING INSTR LTD22 citations93
US7715007B2May 11, 2010
Lateral shift measurement using an optical technique
NOVA MEASURING INSTR LTD11 citations92
US7292341B2Nov 6, 2007
Optical system operating with variable angle of incidence
NOVA MEASURING INSTR LTD33 citations92
US7030957B2Apr 18, 2006
Monitoring apparatus and method particularly useful in photolithographically processing substrates
NOVA MEASURING INSTR LTD13 citations92
US6643017B2Nov 4, 2003
Method and system for controlling the photolithography process
NOVA MEASURING INSTR LTD22 citations92
US7327476B2Feb 5, 2008
Thin films measurement method and system
NOVA MEASURING INSTR LTD12 citations91
US6407809B1Jun 18, 2002
Optical inspection system and method
NOVA MEASURING INSTR LTD37 citations91
US6368181B1Apr 9, 2002
Apparatus for optical inspection of wafers during polishing
NOVA MEASURING INSTR LTD19 citations90
USRE40225EApr 8, 2008
Two-dimensional beam deflector
NOVA MEASURING INSTR LTD9 citations84
US6806971B2Oct 19, 2004
Method and apparatus for process control in semiconductor manufacture
NOVA MEASURING INSTR LTD17 citations84
US6801315B2Oct 5, 2004
Method and system for overlay measurement
NOVA MEASURING INSTR LTD13 citations84
US9291911B2Mar 22, 2016
Monitoring apparatus and method particularly useful in photolithographically processing substrates
NOVA MEASURING INSTR LTD3 citations83
US6801326B2Oct 5, 2004
Method and apparatus for monitoring a chemical mechanical planarization process applied to metal-based patterned objects
NOVA MEASURING INSTR LTD13 citations83
US7301163B2Nov 27, 2007
Lateral shift measurement using an optical technique
NOVA MEASURING INSTR LTD9 citations81
US7289190B2Oct 30, 2007
Monitoring apparatus and method particularly useful in photolithographically
NOVA MEASURING INSTR LTD9 citations81
US8023122B2Sep 20, 2011
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD6 citations74
US7927184B2Apr 19, 2011
Method and system for endpoint detection
NOVA MEASURING INSTR LTD6 citations74
US7864344B1Jan 4, 2011
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD3 citations74
US7864343B2Jan 4, 2011
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD3 citations74
US7791740B2Sep 7, 2010
Method and system for measuring patterned structures
NOVA MEASURING INSTR LTD5 citations74
US7614932B2Nov 10, 2009
Method and system for endpoint detection
NOVA MEASURING INSTR LTD7 citations74
US7255748B2Aug 14, 2007
Apparatus for integrated monitoring of wafers and for process control in semiconductor manufacturing and a method for use thereof
NOVA MEASURING INSTR LTD7 citations74
ORBOTECH LTD
2 patentsFINAROV MOSHE
1 patentMATUSOVSKY MIKHAEL
1 patentShowing the top 50 of 87 patents by PatentIndex Score.