Inventor · disambiguated record
Henricus Martinus Johannes Van De Groes
Also filed as: VAN DE GROES HENRICUS MARTINUS JOHANNES
8 granted patents·1 pending application·6 citations·filing 2013–2021
76Inventor score
Files withASML NETHERLANDS BV9
Top patents by PatentIndex Score
9 records- 0189US11315752B2E-beam apparatusASML NETHERLANDS BV·Filed 2020·Granted Apr 26, 2022·2 cites·15 claims
- 0280US10867770B2E-beam apparatusASML NETHERLANDS BV·Filed 2019·Granted Dec 15, 2020·2 cites·20 claims
- 0376US10416567B2Illumination system and metrology systemASML NETHERLANDS BV·Filed 2017·Granted Sep 17, 2019·2 cites·13 claims
- 0460US11372343B2Alignment method and associated metrology deviceASML NETHERLANDS BV·Filed 2020·Granted Jun 28, 2022·0 cites·20 claims
- 0550US2023205101A1Apparatus for use in a metrology process or lithographic processASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 0649US11302512B2Electron beam inspection apparatus stage positioningASML NETHERLANDS BV·Filed 2020·Granted Apr 12, 2022·0 cites·19 claims
- 0747US11621142B2Substrate positioning device and electron beam inspection toolASML NETHERLANDS BV·Filed 2020·Granted Apr 4, 2023·0 cites·14 claims
- 0845US9383659B2Positioning system, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Jul 5, 2016·0 cites·14 claims
- 0943US10809634B2Stage system and metrology toolASML NETHERLANDS BV·Filed 2018·Granted Oct 20, 2020·0 cites·16 claims
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