Inventor · disambiguated record
Yukihiro Wakamoto
Also filed as: WAKAMOTO YUKIHIRO
4 granted patents·16 citations·filing 2006–2015
70Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0182US7757626B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2006·Granted Jul 20, 2010·8 cites·11 claims
- 0280US9623435B2Substrate processing apparatus for coating liquid composed of first coating liquid and second coating liquid on substrate with slit-shaped ejection portTOKYO ELECTRON LTD·Filed 2015·Granted Apr 18, 2017·5 cites·11 claims
- 0373US10112210B2Coating processing apparatus for coating liquid on substrate moving in a horizontal direction with slit-shaped ejecting port moving in a vertical directionTOKYO ELECTRON LTD·Filed 2015·Granted Oct 30, 2018·3 cites·5 claims
- 0441US8192796B2Substrate processing apparatus and substrate processing methodSHINYA HIROSHI·Filed 2010·Granted Jun 5, 2012·0 cites·11 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →