Inventor
PETRI CHRISTOPH
DE5 patents
Patents
5 patentsUS11415892B2Aug 16, 2022
Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatus
ZEISS CARL SMT GMBH2 citations63
US11500294B2Nov 15, 2022
Method for replacing a mirror in a projection exposure apparatus, and position- and orientation data measuring device for carrying out the method
ZEISS CARL SMT GMBH0 citations58
US10209620B2Feb 19, 2019
Illumination system for EUV projection exposure apparatus, EUV projection exposure apparatus including illumination system and method for operating an EUV projection exposure apparatus
ZEISS CARL SMT GMBH1 citations57
US10859819B2Dec 8, 2020
Method for changing a surface via particle irradiation
ZEISS CARL SMT GMBH0 citations39
US9841685B2Dec 12, 2017
Determination of a corrected variable
ZEISS CARL SMT GMBH0 citations37