Inventor · disambiguated record

Mohan Ananthanarayanan

Also filed as: ANANTHANARAYANAN MOHAN

1 granted patent·61 citations·filing 2001–2001

50Inventor score

Technology areasG03F

Files withKLA TENCOR1

Top patents by PatentIndex Score

1 record

0188US6581193B1Apparatus and methods for modeling process effects and imaging effects in scanning electron microscopyKLA TENCOR·Filed 2001·Granted Jun 17, 2003·61 cites·32 claims

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