Inventor
HOUNG WEI-HUA
TW5 patents
Patents
5 patentsUS11177150B2Nov 16, 2021
Cluster tool and method using the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US11004713B2May 11, 2021
Robot arm device and method for transferring wafer
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations70
US10854442B2Dec 1, 2020
Orientation chamber of substrate processing system with purging function
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations67
US11837484B2Dec 5, 2023
Robot arm device and method for transferring wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11581181B2Feb 14, 2023
Orientation chamber of substrate processing system with purging function
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57