Inventor
SUGAMOTO JUNJI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “SUGAMOTO JUNJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
10 patentsUS7221991B2May 22, 2007
System and method for monitoring manufacturing apparatuses
TOSHIBA KK24 citations92
US7057259B2Jun 6, 2006
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them
TOSHIBA KK35 citations92
US7324855B2Jan 29, 2008
Process-state management system, management server and control server adapted for the system, method for managing process-states, method for manufacturing a product, and computer program product for the management server
TOSHIBA KK24 citations88
US7742834B2Jun 22, 2010
Management system of semiconductor fabrication apparatus, abnormality factor extraction method of semiconductor fabrication apparatus, and management method of the same
TOSHIBA KK11 citations84
US7314766B2Jan 1, 2008
Semiconductor wafer treatment method, semiconductor wafer inspection method, semiconductor device development method and semiconductor wafer treatment apparatus
TOSHIBA KK9 citations83
US7529631B2May 5, 2009
Defect detection system, defect detection method, and defect detection program
TOSHIBA KK13 citations80
US7979154B2Jul 12, 2011
Method and system for managing semiconductor manufacturing device
TOSHIBA KK3 citations62
US7831330B2Nov 9, 2010
Process control system, process control method, and method of manufacturing electronic apparatus
TOSHIBA KK2 citations61
US7970486B2Jun 28, 2011
Method for controlling semiconductor manufacturing apparatus and control system of semiconductor manufacturing apparatus
TOSHIBA KK1 citations52
US7531462B2May 12, 2009
Method of inspecting semiconductor wafer
TOSHIBA KK0 citations41