Inventor

TSAI CHUN-YIN

TW17 patents

⚠️ This page may combine multiple inventors who share the name “TSAI CHUN-YIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TSAI CHUN-YIN

TAIWAN SEMICONDUCTOR MFG CO LTD

Integrated microphone device and manufacturing method thereof

MEMS microphone having diaphragm

Structure and formation method of semiconductor device structure

MEMS microphone and MEMS accelerometer on a single substrate

Semiconductor device structure with movable membrane

MEMS device with enhanced membrane structure and method of forming the same

MEMS microphone and MEMS accelerometer on a single substrate

Semiconductor device structure with movable membrane

MEMS device with enhanced membrane structure and method of forming the same

Semiconductor structure and method for manufacturing thereof

MEMS device with enhanced membrane structure and method of forming the same

Method of forming semiconductor device structure

MEMS microphone having diaphragm

Integrated microphone device and manufacturing method thereof

IND TECH RES INST

Micro-electromechanical apparatus utilizing folded spring for rotary element

Microelectromechanical system-based resonator device

Light sensing device and fabricating method thereof