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Inventor

HARTE KENNETH J

US31 patents
⚠️ This page may combine multiple inventors who share the name “HARTE KENNETH J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CONTROL DATA CORP

14 patents
US4820927AApr 11, 1989

Electron beam source employing a photo-emitter cathode

CONTROL DATA CORP57 citations96
US4694178ASep 15, 1987

Multiple channel electron beam optical column lithography system and method of operation

CONTROL DATA CORP81 citations96
US4467211AAug 21, 1984

Method and apparatus for exposing multi-level registered patterns interchangeably between stations of a multi-station electron-beam array lithography (EBAL) system

CONTROL DATA CORP71 citations96
US4430571AFeb 7, 1984

Method and apparatus for exposing multi-level registered patterns interchangeably between stations of a multi-station electron-beam array lithography (EBAL) system

CONTROL DATA CORP62 citations96
US4390789AJun 28, 1983

Electron beam array lithography system employing multiple parallel array optics channels and method of operation

CONTROL DATA CORP52 citations92
US4661709AApr 28, 1987

Modular all-electrostatic electron-optical column and assembly of said columns into an array and method of manufacture

CONTROL DATA CORP47 citations91
US4338548AJul 6, 1982

Unipotential lens assembly for charged particle beam tubes and method for applying correction potentials thereto

CONTROL DATA CORP41 citations89
US4142132AFeb 27, 1979

Method and means for dynamic correction of electrostatic deflector for electron beam tube

CONTROL DATA CORP25 citations82
US4342949AAug 3, 1982

Charged particle beam structure having electrostatic coarse and fine double deflection system with dynamic focus and diverging beam

CONTROL DATA CORP25 citations78
US4675528AJun 23, 1987

Method for measurement of spotsize and edgewidth in electron beam lithography

CONTROL DATA CORP24 citations77
US4683366AJul 28, 1987

All electrostatic electron optical sub-system for variable electron beam spot shaping and method of operation

CONTROL DATA CORP17 citations73
US4122530AOct 24, 1978

Data management method and system for random access electron beam memory

CONTROL DATA CORP11 citations69
US4661741AApr 28, 1987

Miniature electron gun with focusing grid structure

CONTROL DATA CORP7 citations66
US4728799AMar 1, 1988

Height measurement and correction method for electron beam lithography system

CONTROL DATA CORP14 citations64

PHOTOELECTRON CORP

9 patents

MILLMAN JR RONALD P

2 patents

HARTE KENNETH J

2 patents

ZEISS CARL AG

1 patent

HUGHES DANBURY OPTICAL SYST

1 patent

SMITH DONALD O

1 patent

UVTECH SYS INC

1 patent