Inventor

KITAZAWA TAKASHI

JP20 patents

⚠️ This page may combine multiple inventors who share the name “KITAZAWA TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KITAZAWA TAKASHI

TOKYO ELECTRON LTD

Exhaust ring for manufacturing semiconductors

Vacuum apparatus

Vacuum processing apparatus and control method thereof

Substrate processing apparatus

Supporting member and substrate processing apparatus

Processing method and processing apparatus

YASKAWA DENKI SEISAKUSHO KK

Motor speed controller and gain setting method of the controller

Motor control device

Motor control apparatus

TOSHIBA KK

Vacuum processing apparatus and substrate transfer method

Vacuum processing apparatus and substrate transfer method

FUKUSHIMA TETSUYA

Circuit device having funnel shaped lead and method for manufacturing the same

Lead frame and method for manufacturing circuit device using the same

CKD CORP

Relative pressure control system and relative flow control system

HORIGUCHI MASATO

Plasma processing apparatus

KITAZAWA TAKASHI

Semiconductor device with copper wire ball-bonded to electrode pad including buffer layer

SANYO ELECTRIC CO

Circuit device

KK YASKAWA DENKI

Abnormality information estimation system, operation analysis system, motor control device, abnormality information estimation method, and program

SATO TETSUJI

Substrate mounting table of substrate processing apparatus

OYABU JUN

Method of setting thickness of dielectric and substrate processing apparatus having dielectric disposed in electrode