USD494552SExpiredUtility

Exhaust ring for manufacturing semiconductors

97
Assignee: TOKYO ELECTRON LTDPriority: Dec 12, 2002Filed: Jun 12, 2003Granted: Aug 17, 2004
Est. expiryDec 12, 2022(expired)· nominal 20-yr term from priority
Inventors:Kazuyuki TezukaTakashi KitazawaNorihiko AmikuraHiroshi Koizumi
97
PatentIndex Score
432
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1
Claims

Claims

exact text as granted — not AI-modified
We claim the ornamental design for exhaust ring for manufacturing semiconductors, as shown and described.

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