Inventor · disambiguated record
Carlton Ashley Washburn
Also filed as: WASHBURN CARLTON · WASHBURN CARLTON A · WASHBURN CARLTON ASHLEY
6 granted patents·326 citations·filing 2004–2012
83Inventor score
Top patents by PatentIndex Score
6 records- 0195US8968989B2Assist layers for EUV lithographyBREWER SCIENCE INC·Filed 2012·Granted Mar 3, 2015·297 cites·15 claims
- 0272US7602066B2Method of filling structures for forming via-first dual damascene interconnectsBREWER SCIENCE INC·Filed 2007·Granted Oct 13, 2009·4 cites·6 claims
- 0371US7364835B2Developer-soluble materials and methods of using the same in via-first dual damascene applicationsBREWER SCIENCE INC·Filed 2004·Granted Apr 29, 2008·17 cites·36 claims
- 0465US8877430B2Methods of producing structures using a developer-soluble layer with multilayer technologyWASHBURN CARLTON ASHLEY·Filed 2011·Granted Nov 4, 2014·3 cites·18 claims
- 0555US9960038B2Processes to pattern small features for advanced patterning needsWASHBURN CARLTON ASHLEY·Filed 2011·Granted May 1, 2018·1 cites·19 claims
- 0651US7348281B2Method of filling structures for forming via-first dual damascene interconnectsBREWER SCIENCE INC·Filed 2004·Granted Mar 25, 2008·4 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →