Inventor · disambiguated record
Tomonari Urano
Also filed as: URANO TOMONARI
2 granted patents·1 pending application·0 citations·filing 2016–2018
25Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0153US2016240370A1Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
- 0247US11414742B2Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2018·Granted Aug 16, 2022·0 cites·1 claims
- 0333US10242878B2Substrate processing method and recording mediumTOKYO ELECTRON LTD·Filed 2017·Granted Mar 26, 2019·0 cites·8 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →