Inventor
TU YEUR-LUEN
TW246 patents
⚠️ This page may combine multiple inventors who share the name “TU YEUR-LUEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
22 patentsUS9437572B2Sep 6, 2016
Conductive pad structure for hybrid bonding and methods of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD227 citations99
US9960129B2May 1, 2018
Hybrid bonding mechanisms for semiconductor wafers
TAIWAN SEMICONDUCTOR MFG CO LTD22 citations94
US9711555B2Jul 18, 2017
Dual facing BSI image sensors with wafer level stacking
TAIWAN SEMICONDUCTOR MFG CO LTD31 citations94
US9704904B2Jul 11, 2017
Deep trench isolation structures and methods of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD22 citations94
US9490158B2Nov 8, 2016
Bond chuck, methods of bonding, and tool including bond chuck
TAIWAN SEMICONDUCTOR MFG CO LTD15 citations93
US9793243B2Oct 17, 2017
Buffer layer(s) on a stacked structure having a via
TAIWAN SEMICONDUCTOR MFG CO LTD17 citations92
US9040385B2May 26, 2015
Mechanisms for cleaning substrate surface for hybrid bonding
TAIWAN SEMICONDUCTOR MFG CO LTD24 citations92
US9899441B1Feb 20, 2018
Deep trench isolation (DTI) structure with a tri-layer passivation layer
TAIWAN SEMICONDUCTOR MFG CO LTD17 citations86
US11189515B2Nov 30, 2021
Method for alignment, process tool and method for wafer-level alignment
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US10790189B2Sep 29, 2020
3D integrated circuit and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US10658410B2May 19, 2020
Image sensor having improved full well capacity and related method of formation
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US10553474B1Feb 4, 2020
Method for forming a semiconductor-on-insulator (SOI) substrate
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US10510723B2Dec 17, 2019
Buffer layer(s) on a stacked structure having a via
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US10468486B2Nov 5, 2019
SOI substrate, semiconductor device and method for manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US10453757B2Oct 22, 2019
Transistor channel
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US10319768B2Jun 11, 2019
Image sensor scheme for optical and electrical improvement
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US10163949B2Dec 25, 2018
Image device having multi-layered refractive layer on back surface
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US10147756B2Dec 4, 2018
Deep trench isolation structure and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US9978650B2May 22, 2018
Transistor channel
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US9905600B1Feb 27, 2018
Image sensor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US9871095B2Jan 16, 2018
Stacked capacitor with enhanced capacitance and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US9837291B2Dec 5, 2017
Wafer processing method and apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
TAIWAN SEMICONDUCTOR MFG
15 patentsUS9257399B2Feb 9, 2016
3D integrated circuit and methods of forming the same
TAIWAN SEMICONDUCTOR MFG232 citations99
US6362012B1Mar 26, 2002
Structure of merged vertical capacitor inside spiral conductor for RF and mixed-signal applications
TAIWAN SEMICONDUCTOR MFG138 citations99
US6271084B1Aug 7, 2001
Method of fabricating a metal-insulator-metal (MIM), capacitor structure using a damascene process
TAIWAN SEMICONDUCTOR MFG169 citations99
US9142517B2Sep 22, 2015
Hybrid bonding mechanisms for semiconductor wafers
TAIWAN SEMICONDUCTOR MFG247 citations98
US6492245B1Dec 10, 2002
Method of forming air gap isolation between a bit line contact structure and a capacitor under bit line structure
TAIWAN SEMICONDUCTOR MFG119 citations98
US6486529B2Nov 26, 2002
Structure of merged vertical capacitor inside spiral conductor for RF and mixed-signal applications
TAIWAN SEMICONDUCTOR MFG56 citations96
US6528366B1Mar 4, 2003
Fabrication methods of vertical metal-insulator-metal (MIM) capacitor for advanced embedded DRAM applications
TAIWAN SEMICONDUCTOR MFG89 citations95
US9331032B2May 3, 2016
Hybrid bonding and apparatus for performing the same
TAIWAN SEMICONDUCTOR MFG24 citations94
US6501120B1Dec 31, 2002
Capacitor under bitline (CUB) memory cell structure employing air gap void isolation
TAIWAN SEMICONDUCTOR MFG25 citations93
US6342419B1Jan 29, 2002
DRAM capacitor and a method of fabricating the same
TAIWAN SEMICONDUCTOR MFG28 citations93
US8053856B1Nov 8, 2011
Backside illuminated sensor processing
TAIWAN SEMICONDUCTOR MFG26 citations92
US6653203B1Nov 25, 2003
Thin sidewall multi-step HDP deposition method to achieve completely filled high aspect ratio trenches
TAIWAN SEMICONDUCTOR MFG33 citations92
US6555442B1Apr 29, 2003
Method of forming shallow trench isolation with rounded corner and divot-free by using disposable spacer
TAIWAN SEMICONDUCTOR MFG35 citations92
US6486025B1Nov 26, 2002
Methods for forming memory cell structures
TAIWAN SEMICONDUCTOR MFG36 citations92
US8816358B1Aug 26, 2014
Plasmonic nanostructures for organic image sensors
TAIWAN SEMICONDUCTOR MFG30 citations91
WORLDWIDE SEMICONDUCTOR MANUFA
4 patentsUS5916823AJun 29, 1999
Method for making dual damascene contact
WORLDWIDE SEMICONDUCTOR MANUFA56 citations96
US6100138AAug 8, 2000
Method to fabricate DRAM capacitor using damascene processes
WORLDWIDE SEMICONDUCTOR MANUFA42 citations93
US6100129AAug 8, 2000
Method for making fin-trench structured DRAM capacitor
WORLDWIDE SEMICONDUCTOR MANUFA49 citations93
US5932487AAug 3, 1999
Method for forming a planar intermetal dielectric layer
WORLDWIDE SEMICONDUCTOR MANUFA38 citations93
VANGUARD INT SEMICONDUCT CORP
4 patentsUS6017614AJan 25, 2000
Plasma-enhanced chemical vapor deposited SIO2 /SI3 N4 multilayer passivation layer for semiconductor applications
VANGUARD INT SEMICONDUCT CORP70 citations95
US5851603ADec 22, 1998
Method for making a plasma-enhanced chemical vapor deposited SiO2 Si3 N4 multilayer passivation layer for semiconductor applications
VANGUARD INT SEMICONDUCT CORP59 citations95
US6080664AJun 27, 2000
Method for fabricating a high aspect ratio stacked contact hole
VANGUARD INT SEMICONDUCT CORP48 citations92
US5962344AOct 5, 1999
Plasma treatment method for PECVD silicon nitride films for improved passivation layers on semiconductor metal interconnections
VANGUARD INT SEMICONDUCT CORP44 citations92
TAIWANT SEMICONDUCTOR MFG CO L
1 patentWORLDWIDE SEMICONDUCTOR CORP
1 patentHSU HUNG-WEN
1 patentTIAWAN SEMICONDUCTOR MFG CO LT
1 patentWORLDWIDE SEMICONDUCTOR MFG
1 patentShowing the top 50 of 246 patents by PatentIndex Score.