Inventor
RAVI JALLEPALLY
US34 patents
⚠️ This page may combine multiple inventors who share the name “RAVI JALLEPALLY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
30 patentsUS7572052B2Aug 11, 2009
Method for monitoring and calibrating temperature in semiconductor processing chambers
APPLIED MATERIALS INC64 citations98
US6620670B2Sep 16, 2003
Process conditions and precursors for atomic layer deposition (ALD) of AL2O3
APPLIED MATERIALS INC217 citations98
US8043907B2Oct 25, 2011
Atomic layer deposition processes for non-volatile memory devices
APPLIED MATERIALS INC42 citations92
US7659158B2Feb 9, 2010
Atomic layer deposition processes for non-volatile memory devices
APPLIED MATERIALS INC25 citations92
US6888104B1May 3, 2005
Thermally matched support ring for substrate processing chamber
APPLIED MATERIALS INC41 citations92
US9888528B2Feb 6, 2018
Substrate support with multiple heating zones
APPLIED MATERIALS INC11 citations83
US6374150B2Apr 16, 2002
Method and apparatus for monitoring and/or end point detecting a process
APPLIED MATERIALS INC17 citations83
US10892180B2Jan 12, 2021
Lift pin assembly
APPLIED MATERIALS INC16 citations82
US11555244B2Jan 17, 2023
High temperature dual chamber showerhead
APPLIED MATERIALS INC4 citations73
US9779971B2Oct 3, 2017
Methods and apparatus for rapidly cooling a substrate
APPLIED MATERIALS INC4 citations73
US11201078B2Dec 14, 2021
Substrate position calibration for substrate supports in substrate processing systems
APPLIED MATERIALS INC2 citations71
USD1089130SAug 19, 2025
Process chamber manifold
APPLIED MATERIALS INC1 citations62
US12230479B2Feb 18, 2025
Processing chamber with multiple plasma units
APPLIED MATERIALS INC0 citations62
US11955319B2Apr 9, 2024
Processing chamber with multiple plasma units
APPLIED MATERIALS INC0 citations62
US10312116B2Jun 4, 2019
Methods and apparatus for rapidly cooling a substrate
APPLIED MATERIALS INC1 citations62
USD1112376SFeb 10, 2026
Process chamber mixer
APPLIED MATERIALS INC0 citations60
USD1101709SNov 11, 2025
Process chamber shower head
APPLIED MATERIALS INC0 citations59
US11955381B2Apr 9, 2024
Low-temperature plasma pre-clean for selective gap fill
APPLIED MATERIALS INC0 citations59
USD1009817SJan 2, 2024
Shadow ring lift pin
APPLIED MATERIALS INC0 citations59
USD997893SSep 5, 2023
Shadow ring lift plate
APPLIED MATERIALS INC1 citations59
USD997894SSep 5, 2023
Shadow ring lift assembly
APPLIED MATERIALS INC0 citations59
US12016092B2Jun 18, 2024
Gas distribution ceramic heater for deposition chamber
APPLIED MATERIALS INC0 citations58
US12315746B2May 27, 2025
Bottom cover plate to reduce wafer planar nonuniformity
APPLIED MATERIALS INC0 citations55
US12486576B2Dec 2, 2025
Shadow ring lift to improve wafer edge performance
APPLIED MATERIALS INC0 citations52
US12152302B2Nov 26, 2024
Multiple-channel showerhead design and methods in manufacturing
APPLIED MATERIALS INC0 citations52
US11721542B2Aug 8, 2023
Dual plasma pre-clean for selective gap fill
APPLIED MATERIALS INC0 citations52
US12228395B2Feb 18, 2025
Substrate position calibration for substrate supports in substrate processing systems
APPLIED MATERIALS INC0 citations50
US10134615B2Nov 20, 2018
Substrate support with improved RF return
APPLIED MATERIALS INC0 citations50
US10199204B2Feb 5, 2019
Target retaining apparatus
APPLIED MATERIALS INC0 citations46
US11939668B2Mar 26, 2024
Gas delivery for tungsten-containing layer
APPLIED MATERIALS INC0 citations44