Inventor · disambiguated record

Tooru Tokimatu

Also filed as: TOKIMATU TOORU

1 granted patent·4 citations·filing 2018–2018

24Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0182US10879100B2Substrate transfer device, substrate transfer method and recording mediumTOKYO ELECTRON LTD·Filed 2018·Granted Dec 29, 2020·4 cites·10 claims

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