Inventor
NATU GAYATRI
IN9 patents
Patents
9 patentsUS11540432B2Dec 27, 2022
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC1 citations70
US12564012B2Feb 24, 2026
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC0 citations59
US12004337B2Jun 4, 2024
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC0 citations59
US11702744B2Jul 18, 2023
Metal oxyfluoride film formation methods
APPLIED MATERIALS INC0 citations59
US11547030B2Jan 3, 2023
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
APPLIED MATERIALS INC0 citations59
US11390947B2Jul 19, 2022
Method of forming a fluorinated metal film
APPLIED MATERIALS INC0 citations48
US12592364B2Mar 31, 2026
Fluoride coating to improve chamber performance
APPLIED MATERIALS INC0 citations46
US12486571B2Dec 2, 2025
Atomic layer deposition coating system for inner walls of gas lines
APPLIED MATERIALS INC0 citations43
US12404584B2Sep 2, 2025
Parallel atomic layer deposition of target element interiors
APPLIED MATERIALS INC0 citations41