Inventor

NAGAYASU NOBUO

JP3 patents

Patents

3 patents

US7353076B2Apr 1, 2008

Vacuum processing method and vacuum processing apparatus

HITACHI HIGH TECH CORP14 citations80

US7296783B2Nov 20, 2007

Vacuum processing apparatus

HITACHI HIGH TECH CORP2 citations60

USD546354SJul 10, 2007

Semiconductor manufacturing apparatus

HITACHI HIGH TECH CORP4 citations57