USD546354SExpiredUtility

Semiconductor manufacturing apparatus

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Assignee: HITACHI HIGH TECH CORPPriority: Jul 15, 2005Filed: Aug 26, 2005Granted: Jul 10, 2007
Est. expiryJul 15, 2025(expired)· nominal 20-yr term from priority
Inventors:Hideki KiharaMinoru SoraokaYuzo OhirabaruNobuo Nagayasu
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PatentIndex Score
4
Cited by
8
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a semiconductor manufacturing apparatus, as shown.

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