Inventor · disambiguated record
Minoru Soraoka
Also filed as: SORAOKA MINORU
25 granted patents·7 pending applications·664 citations·filing 1981–2015
97Inventor score
Top patents by PatentIndex Score
32 records- 0199US5855726AVacuum processing apparatus and semiconductor manufacturing line using the sameHITACHI LTD·Filed 1996·Granted Jan 5, 1999·407 cites·15 claims
- 0294US6519504B1Vacuum processing apparatus and semiconductor manufacturing line using the sameHITACHI LTD·Filed 2000·Granted Feb 11, 2003·45 cites·20 claims
- 0390US7828928B2Vacuum processing apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Nov 9, 2010·10 cites·8 claims
- 0488US9620399B2Load portHIRATA SPINNING·Filed 2015·Granted Apr 11, 2017·7 cites·13 claims
- 0586US7335277B2Vacuum processing apparatusHITACHI HIGH TECH CORP·Filed 2003·Granted Feb 26, 2008·24 cites·12 claims
- 0682US7347656B2Vacuum processing apparatus and semiconductor manufacturing line using the sameHITACHI LTD·Filed 2005·Granted Mar 25, 2008·3 cites·14 claims
- 0782US4936967AMethod of detecting an end point of plasma treatmentHITACHI LTD·Filed 1987·Granted Jun 26, 1990·30 cites·4 claims
- 0875US7247207B2Vacuum processing apparatusHITACHI HIGH TECH CORP·Filed 2004·Granted Jul 24, 2007·11 cites·13 claims
- 0974US6752579B2Vacuum processing apparatus and semiconductor manufacturing line using the sameHITACHI LTD·Filed 2001·Granted Jun 22, 2004·7 cites·27 claims
- 1070US6705828B2Vacuum processing apparatus and semiconductor manufacturing line using the sameHITACHI LTD·Filed 2001·Granted Mar 16, 2004·11 cites·3 claims
- 1170US6526330B2Vacuum processing apparatus and semiconductor manufacturing line using the sameHITACHI LTD·Filed 2001·Granted Feb 25, 2003·5 cites·5 claims
- 1270US4453757AWafer gripping deviceHITACHI LTD·Filed 1981·Granted Jun 12, 1984·30 cites·14 claims
- 1367US7833382B2Vacuum processing apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Nov 16, 2010·1 cites·11 claims
- 1465US5861601AMicrowave plasma processing apparatus and methodHITACHI LTD·Filed 1994·Granted Jan 19, 1999·45 cites·2 claims
- 1563US6752580B2Vacuum processing apparatus and semiconductor manufacturing line using the sameHITACHI LTD·Filed 2001·Granted Jun 22, 2004·3 cites·14 claims
- 1662US6672819B1Vacuum processing apparatus and semiconductor manufacturing line using the sameHITACHI LTD·Filed 2000·Granted Jan 6, 2004·7 cites·6 claims
- 1762US2009220322A1Vacuum Processing Apparatus And Semiconductor Manufacturing Line Using The SameSORAOKA MINORU·Filed 2009·Application pending·0 cites
- 1860US2008138180A1Vacuum processing apparatus and semiconductor manufacturing line using the sameSORAOKA MINORU·Filed 2008·Application pending·0 cites
- 1958US6188935B1Vacuum processing apparatus and semiconductor manufacturing line using the sameHITACHI LTD·Filed 1998·Granted Feb 13, 2001·9 cites·7 claims
- 2057US7976632B2Vacuum processing apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Jul 12, 2011·0 cites·10 claims
- 2154US6895685B2Vacuum processing apparatus and semiconductor manufacturing line using the sameHITACHI LTD·Filed 2003·Granted May 24, 2005·1 cites·15 claims
- 2253US6962472B2Vacuum processing apparatus and semiconductor manufacturing line using the sameHITACHI LTD·Filed 2001·Granted Nov 8, 2005·1 cites·11 claims
- 2348US8460467B2Vacuum processing apparatusMAKINO AKITAKA·Filed 2011·Granted Jun 11, 2013·0 cites·15 claims
- 2447US2004197169A1Vacuum processing apparatus and semiconductor manufacturing line using the sameFiled 2004·Application pending·0 cites
- 2546US2007066204A1Load portHIRATA SPINNING·Filed 2006·Application pending·0 cites
- 2644US7201551B2Vacuum processing apparatus and semiconductor manufacturing line using the sameHITACHI LTD·Filed 2001·Granted Apr 10, 2007·0 cites·14 claims
- 2744US6430469B2Vacuum processing apparatus and semiconductor manufacturing line using the sameHITACHI LTD·Filed 2000·Granted Aug 6, 2002·0 cites·7 claims
- 2844US2002082744A1Vacuum processing apparatus and semiconductor manufacturing line using the sameFiled 2002·Application pending·0 cites
- 2944US2002099469A1Vacuum processing apparatus and semiconductor manufacturing line using the sameFiled 2002·Application pending·0 cites
- 3044US2002091465A1Vacuum processing apparatus and semiconductor manufacturing line using the sameFiled 2002·Application pending·0 cites
- 3141US6253117B1Vacuum processing apparatus and semiconductor manufacturing line using the sameHITACHI LTD·Filed 1998·Granted Jun 26, 2001·3 cites·2 claims
- 3235USD546354SSemiconductor manufacturing apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Jul 10, 2007·4 cites·1 claims
Join the waitlist — get patent alerts
Get an alert when Minoru Soraoka files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →