Load port

Abstract

A load port is provided with a table and a plate. The table is arranged on a side of a front wall of an atmospheric transfer unit for transferring a piece of material under processing and is adapted to mount on it a container with the piece of material received in the same. The plate serves to isolate an interior of the atmospheric transfer unit from an exterior of the atmospheric transfer unit. The load port includes an exhaust duct arranged on a rear side of the plate and a fan arranged in a lower extremity of the exhaust duct. By the exhaust duct and the fan, an internal atmosphere of the atmospheric transfer unit can be exhausted into the atmosphere.

1 . A load port provided with a table arranged on a side of a front wall of an atmospheric transfer unit for transferring a piece of material under processing and adapted to mount thereon a container with said piece of material received therein, and a plate for isolating an interior of said atmospheric transfer unit from an exterior of said atmospheric transfer unit, comprising: 
 an exhaust duct arranged on a rear side of said plate, and    a fan arranged in a lower extremity of said exhaust duct;    wherein by said exhaust duct and said fan, an internal atmosphere of said atmospheric transfer unit can be exhausted into the atmosphere.    
   
   
       2 . A load port according to  claim 1 , wherein by said exhaust duct and said fan, an internal atmosphere of said container can be exhausted to said exterior of said atmospheric transfer unit.  
   
   
       3 . A load port provided with a table arranged on a side of a front wall of an atmospheric transfer unit for transferring a piece of material under processing and adapted to mount thereon a container with said piece of material received therein, a plate for isolating an interior of said atmospheric transfer unit from an exterior of said atmospheric transfer unit, an opening formed in said plate to permit taking said piece of material out of said container or placing said piece of material in said container, and an accommodation chamber arranged on a side of said front wall of said atmospheric transfer unit and accommodating therein a drive unit for driving a door that opens or closes said opening of said plate, comprising: 
 an exhaust duct arranged on a rear side of said plate, and    a fan arranged in a lower extremity of said exhaust duct;    wherein by said exhaust duct and said fan, an internal atmosphere of said accommodation chamber can be exhausted to said exterior of said atmospheric transfer unit.    
   
   
       4 . A load port according to  claim 3 , wherein by said exhaust duct and said fan, an internal atmosphere of said container can be exhausted to said exterior of said atmospheric transfer unit.  
   
   
       5 . A load port according to  claim 3 , wherein a corrosion preventive coating is applied to at least one of a surface of said exhaust duct, a surface of said fan, and a door carrier with said door supported thereon.  
   
   
       6 . A load port according to  claim 3 , further comprising a closure plate arranged between said door, which has moved to open said opening, and said plate, which isolates said interior of said atmospheric transfer unit and said exterior of said atmospheric transfer unit from each other, such that an interior atmosphere of said atmospheric transfer unit is prevented from flowing into said accommodation chamber.