Inventor · disambiguated record
Budiman Sutedja
Also filed as: SUTEDJA BUDIMAN
2 granted patents·1 pending application·3 citations·filing 2005–2006
38Inventor score
Files withASML NETHERLANDS BV3
Top patents by PatentIndex Score
3 records- 0164US7626681B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2005·Granted Dec 1, 2009·3 cites·19 claims
- 0244US2008083818A1Measuring the bonding of bonded substratesASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
- 0341US7567340B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jul 28, 2009·0 cites·21 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →