P

Inventor

LEE JUN-SEOK

KR111 patents
⚠️ This page may combine multiple inventors who share the name “LEE JUN-SEOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LG SEMICON CO LTD

18 patents
US6033811AMar 7, 2000

Optical proximity correction mask for semiconductor device fabrication

LG SEMICON CO LTD52 citations96
US5725969AMar 10, 1998

Method of manufacturing phase-shifting mask comprising a light shield pattern on a phase-shifting attenuatting layer

LG SEMICON CO LTD63 citations96
US5700626ADec 23, 1997

Method for forming multi-layer resist pattern

LG SEMICON CO LTD72 citations94
US5932378AAug 3, 1999

Phase shifting photomask fabrication method

LG SEMICON CO LTD22 citations93
US5856049AJan 5, 1999

Phase shift mask and method for manufacturing same

LG SEMICON CO LTD36 citations93
US5766805AJun 16, 1998

Method for fabricating phase shift mask

LG SEMICON CO LTD35 citations91
US5914204AJun 22, 1999

Phase shifting mask and a manufacturing method therefor

LG SEMICON CO LTD18 citations84
US5770350AJun 23, 1998

Method for forming pattern using multilayer resist

LG SEMICON CO LTD18 citations84
US5972540AOct 26, 1999

Phase-shifting mask and a manufacturing method thereof

LG SEMICON CO LTD9 citations74
US5900337AMay 4, 1999

Phase shift mask and method for fabricating the same

LG SEMICON CO LTD8 citations74
US5824439AOct 20, 1998

Phase shifiting mask and method of manufacturing the same

LG SEMICON CO LTD10 citations74
US5637425AJun 10, 1997

Method for fabricating phase shift mask comprising a polymethylmethacrylate phase shift film

LG SEMICON CO LTD10 citations74
US5824438AOct 20, 1998

Structure of phase shifting mask and method of manufacturing the same comprising an adhesive layer between a phase shift layer and a light blocking layer

LG SEMICON CO LTD8 citations73
US5858577AJan 12, 1999

Phase shift mask and fabrication method thereof

LG SEMICON CO LTD7 citations71
US6017659AJan 25, 2000

Phase shifting photomask fabrication method

LG SEMICON CO LTD6 citations63
US5998070ADec 7, 1999

Mask pattern

LG SEMICON CO LTD5 citations63
US5851708ADec 22, 1998

Method for fabricating phase shifting mask and a phase shifting mask

LG SEMICON CO LTD5 citations63
US5851705ADec 22, 1998

Method for manufacturing a self-aligned type out-rigger phase shift mask

LG SEMICON CO LTD5 citations63

SAMSUNG ELECTRONICS CO LTD

7 patents

LG ELECTRONICS INC

5 patents

LG DISPLAY CO LTD

4 patents

DONGBU ELECTRONICS CO LTD

4 patents

LEE JUN SEOK

3 patents

SAMSUNG DISPLAY CO LTD

3 patents

INNOTIVE INC KOREA

1 patent

3M INNOVATIVE PROPERTIES CO

1 patent

GOLD STAR ELECTRONICS

1 patent

LEE HEEYOUNG

1 patent

VADAS CO LTD

1 patent

DONGBU HITEK CO LTD

1 patent

Showing the top 50 of 111 patents by PatentIndex Score.