Inventor

KAWADA HIROKI

JP64 patents

⚠️ This page may combine multiple inventors who share the name “KAWADA HIROKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KAWADA HIROKI

HITACHI HIGH TECH CORP

Pattern inspection method

Charged particle beam device and inspection device

Evaluation method of fine pattern feature, its equipment, and method of semiconductor device fabrication

High-accuracy pattern shape evaluating method and apparatus

Method and apparatus for measuring dimension using electron microscope

Image forming method and charged particle beam apparatus

Tool-to-tool matching control method and its system for scanning electron microscope

Charged particle beam apparatus and methods for capturing images using the same

High-accuracy pattern shape evaluating method and apparatus

Tool-to-tool matching control method and its system for scanning electron microscope

Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopes

Measuring method and its apparatus

Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system

Sample dimension measuring method and scanning electron microscope

Scanning electron microscope and a method for evaluating accuracy of repeated measurement using the same

Image forming method and charged particle beam apparatus

Method and apparatus for measuring dimension using electron microscope

Scanning electron microscope

Scanning electron microscope and CD measurement calibration standard specimen

High-accuracy pattern shape evaluating method and apparatus

Scanning electron microscope and CD measurement calibration standard specimen

Method for controlling charged particle beam, and charged particle beam apparatus

Method of measurement accuracy improvement by control of pattern shrinkage

Pattern measurement method and pattern measurement device

Method and device for line pattern shape evaluation

Pattern measurement method and pattern measurement device

Length measurement system

Sample dimension measuring method and scanning electron microscope

Method for controlling charged particle beam, and charged particle beam apparatus

Method and apparatus for measuring dimension using electron microscope

Measuring method, data processing apparatus and electron microscope using same

Scanning electron microscope

Measurement system and measurement method

Scanning electron microscope and image signal processing method

Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope

Evaluation method of fine pattern feature, its equipment, and method of semiconductor device fabrication

Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope

Method of measurement accuracy improvement by control of pattern shrinkage

Measurement device, calibration method of measurement device, and calibration member

HITACHI LTD

Semiconductor device manufacturing apparatus and method with optical monitoring of state of processing chamber

Method for measuring dimensions of sample and scanning electron microscope

Vacuum heating furnace with tapered portion

Vacuum heating furnace with tapered portion

KAWADA HIROKI

Pattern dimension measurement method and charged particle beam apparatus

Image processing device, charged particle beam device, charged particle beam device adjustment sample, and manufacturing method thereof

NIPPON CATALYTIC CHEM IND

Water-absorbing resin composition

Absorption agent and absorbent article

YAMAGUCHI ATSUKO

Apparatus for data analysis

SEKIGUCHI TOMOKO

Method for estimating shape before shrink and CD-SEM apparatus

OOSAKI MAYUKA

Tool-to-tool matching control method and its system for scanning electron microscope