Inventor
XU CANGSHAN
US20 patents
⚠️ This page may combine multiple inventors who share the name “XU CANGSHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
19 patentsUS7001243B1Feb 21, 2006
Neural network control of chemical mechanical planarization
LAM RES CORP76 citations96
US6561889B1May 13, 2003
Methods for making reinforced wafer polishing pads and apparatuses implementing the same
LAM RES CORP83 citations96
US6930782B1Aug 16, 2005
End point detection with imaging matching in semiconductor processing
LAM RES CORP56 citations95
US6572463B1Jun 3, 2003
Methods for making reinforced wafer polishing pads utilizing direct casting and apparatuses implementing the same
LAM RES CORP56 citations94
US6406363B1Jun 18, 2002
Unsupported chemical mechanical polishing belt
LAM RES CORP113 citations94
US6931330B1Aug 16, 2005
Methods for monitoring and controlling chemical mechanical planarization
LAM RES CORP23 citations91
US6806100B1Oct 19, 2004
Molded end point detection window for chemical mechanical planarization
LAM RES CORP23 citations91
US6656030B2Dec 2, 2003
Unsupported chemical mechanical polishing belt
LAM RES CORP19 citations89
US6315634B1Nov 13, 2001
Method of optimizing chemical mechanical planarization process
LAM RES CORP31 citations86
US6552812B1Apr 22, 2003
Method and system for measuring threshold length
LAM RES CORP13 citations83
US6949020B2Sep 27, 2005
Methods for making reinforced wafer polishing pads and apparatuses implementing the same
LAM RES CORP13 citations82
US6790128B1Sep 14, 2004
Fluid conserving platen for optimizing edge polishing
LAM RES CORP13 citations82
US6712679B2Mar 30, 2004
Platen assembly having a topographically altered platen surface
LAM RES CORP18 citations77
US6729945B2May 4, 2004
Apparatus for controlling leading edge and trailing edge polishing
LAM RES CORP11 citations70
US6953391B1Oct 11, 2005
Methods for reducing slurry usage in a linear chemical mechanical planarization system
LAM RES CORP8 citations65
US6761626B2Jul 13, 2004
Air platen for leading edge and trailing edge control
LAM RES CORP3 citations62
US6620035B2Sep 16, 2003
Grooved rollers for a linear chemical mechanical planarization system
LAM RES CORP3 citations62
US6991512B2Jan 31, 2006
Apparatus for edge polishing uniformity control
LAM RES CORP5 citations61
US7018276B2Mar 28, 2006
Air platen for leading edge and trailing edge control
LAM RES CORP0 citations51