Inventor

FREY WILHELM

US38 patents

⚠️ This page may combine multiple inventors who share the name “FREY WILHELM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FREY WILHELM

BOSCH GMBH ROBERT

Acceleration sensing device

Anti-stiction technique for electromechanical systems and electromechanical device employing same

Method for production of a thin film and a thin-film solar cell, in particular, on a carrier substrate

Method for manufacturing a micromechanical device

Magnetic field sensor having deformable conductor loop segment

Decoupled multi-disk gyroscope

Method of producing a radiation sensor

Thermal membrane sensor and method for the production thereof

Electrochemical etching cell

Method for manufacturing breakaway layers for detaching deposited layer systems

Micromechanical oscillating device

Method and device for epitaxial deposition of atoms or molecules from a reactive gas on a deposition surface of a substrate

Sensor, in particular thermal sensor, and method for manufacturing a largely self-supporting membrane

Process for manipulating components, a microtool for implementing the process, and a process for manufacturing the microtool or microtool parts

Filter for electric signals

Acceleration sensor

Anti-stiction technique for electromechanical systems and electromechanical device employing same

Method of manufacturing a micromechanical component

Differential in-plane tunneling current sensor

Device and method for electrostatically levitating a disk and method for using an electrostatic levitated disk as a sensor

Method for manufacturing a semiconductor device

Method for the production of a field-effect structure

Method for producing a monocrystalline layer of a conducting or semiconducting material

Method of producing optical waveguides

Method for producing integrated microsystems

Zinc/air battery with improved lifetime

Micromechanical part and method for its manufacture

Micro-mechanical beam protective support structures wherein at least two adjacent support structures touch each other upon reaching a predetermined bending action

Apparatus, method and system for providing enhanced mechanical protection for thin beams

Differential in-plane tunneling current sensor

Method for producing surface micromechanical structures, and sensor

Method for producing micromechanical structures and a micromechanical structure

Device for determining a pressure and method for manufacturing the same

UNIV CARNEGIE MELLON

Method of fabricating microstructures and devices made therefrom

REIFENHAUSER GMBH & CO KG MASCHINENFABRIK

Process and apparatus for manufacturing spun-bonded fabric

SOMMER SEBASTIAN

Method and apparatus for making a spunbond

UNIV LELAND STANFORD JUNIOR

In-plane mechanically coupled microelectromechanical tuning fork resonators

HENNING FRANK

Method for producing high-pressure sensors