Inventor
OHTAKA TADASHI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “OHTAKA TADASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
7 patentsUS5424541AJun 13, 1995
Scanning electron microscope and method for controlling a scanning electron microscope
HITACHI LTD44 citations92
US4658136AApr 14, 1987
Secondary electron detecting apparatus
HITACHI LTD30 citations91
US5029249AJul 2, 1991
Electron microscope
HITACHI LTD9 citations71
US4866280ASep 12, 1989
Objective lens of an electron beam apparatus
HITACHI LTD10 citations71
US4705950ANov 10, 1987
Specimen-exchanging apparatus
HITACHI LTD8 citations71
US4006357AFeb 1, 1977
Apparatus for displaying image of specimen
HITACHI LTD4 citations60
USD360599SJul 25, 1995
Measurement scanner for semi-conductor
HITACHI LTD0 citations50