Inventor · disambiguated record
Naoki Dai
Also filed as: DAI NAOKI
7 granted patents·1 pending application·65 citations·filing 2002–2012
85Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0187US7442257B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2006·Granted Oct 28, 2008·9 cites·3 claims
- 0286US7575636B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2006·Granted Aug 18, 2009·8 cites·13 claims
- 0385US7087117B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2003·Granted Aug 8, 2006·23 cites·5 claims
- 0483US8777198B2Substrate holding apparatus, substrate holding method, and substrate processing apparatusSEKIMOTO MASAHIKO·Filed 2012·Granted Jul 15, 2014·5 cites·9 claims
- 0572US6824613B2Substrate processing apparatusEBARA CORP·Filed 2002·Granted Nov 30, 2004·16 cites·11 claims
- 0671US8141513B2Substrate holding apparatus, substrate holding method, and substrate processing apparatusSEKIMOTO MASAHIKO·Filed 2011·Granted Mar 27, 2012·2 cites·10 claims
- 0751US7886685B2Substrate holding apparatus, substrate holding method, and substrate processing apparatusEBARA CORP·Filed 2004·Granted Feb 15, 2011·2 cites·2 claims
- 0851US2006243204A1Substrate processing apparatus and substrate processing methodKATSUOKA SEIJI·Filed 2006·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →