Inventor

CHEN HECTOR T H

US2 patents

Patents

2 patents

US5590239ADec 31, 1996

Planar uniform heating surface with additional circumscribing ring

MOTOROLA INC2 citations59

US5509041AApr 16, 1996

X-ray lithography method for irradiating an object to form a pattern thereon

MOTOROLA INC6 citations59