Planar uniform heating surface with additional circumscribing ring

Abstract

A uniform heating fixture and method of use is provided. A heat conductive member having a first plane surface, a second surface and a third plane surface is formed. The first plane surface and the third plane surface are parallel and are connected by a second surface. The third plane surface circumscribes and extends away from the first plane surface, thereby enabling uniform heating of an X-ray mask.

We claim: 
     
       1. A uniform heating fixture in combination with an X-ray mask including a supporting ring structure defining a central opening with a membrane across an end thereof, the fixture comprising: a heat conductive member having a first plane surface, a second surface, and a third plane surface, the first plane surface and the third plane surface being parallel and connected by the second surface, the third plane surface circumscribing and extending away from the first plane surface; and   the heat conductive member extending into the central opening of the supporting ring structure and thereby positioning the first plane surface adjacent the membrane, at least one of the second surface and the third plane surface of the heat conductive member being formed and positioned to engage the supporting ring structure of the X-ray mask and position the membrane parallel with and spaced from the first plane surface.   
     
     
       2. A uniform heating fixture as claimed in claim 1 wherein the first plane surface describes a plane circle. 
     
     
       3. A uniform heating fixture as claimed in claim 2 wherein the second surface describes a concentric ring located around the plane circle. 
     
     
       4. A uniform heating fixture as claimed in claim 1 further including an opening in the first plane surface to provide a vent through the first plane surface. 
     
     
       5. A uniform heating fixture as claimed in claim 1 wherein the heat conductive member is made of a metal. 
     
     
       6. A uniform heating fixture as claimed in claim 5 wherein the metal includes of the following metal material: an aluminum material, a steel material, or a metal alloy material. 
     
     
       7. A uniform heating fixture in combination with an X-ray mask including a supporting ring structure defining a central opening with a membrane across an end thereof, the fixture comprising: a heat conductive member having a first plane surface with an edge, a second surface with a first edge and a second edge, and a third plane surface with an edge, the third plane surface circumscribing the first plane surface and being parallel with the first plane surface, wherein the edge of the first plane surface joins the first edge of the second surface, and wherein the second edge of the second surface joins the edge of the third plane surface; and   the heat conductive member extending into the central opening of the supporting ring structure and thereby positioning the first plane surface adjacent the membrane, the third plane surface of the heat conductive member being formed and positioned to engage the supporting ring structure of the X-ray mask and position the membrane parallel with and spaced from the first plane surface.   
     
     
       8. A uniform heating fixture as claimed in claim 7 wherein the first plane surface describes a plane circle. 
     
     
       9. A uniform heating fixture as claimed in claim 7 wherein the first plane surface describes a rectangle. 
     
     
       10. A uniform heating fixture as claimed in claim 7 further including an opening in the first plane surface to provide a vent through the first plane surface. 
     
     
       11. A uniform heating fixture as claimed in claim 7 wherein the heat conductive member is made of a metal. 
     
     
       12. A uniform heating fixture as claimed in claim 11 wherein the metal is made of one of the following metal materials: an aluminum material, a steel material, or a metal alloy material. 
     
     
       13. A uniform heating fixture in combination with an X-ray mask including a supporting ring structure defining a central opening with a membrane across an end thereof, the fixture comprising: a uniform heating member having a first plane surface with an edge, a second surface with a first edge and a second edge, a third plane surface with a first edge and a second edge, and a fourth surface with an edge, the second surface being positioned substantially perpendicular to the first plane surface at the edge of the first plane surface, the third plane surface being parallel with and circumscribing the first plane surface, wherein the edge of the first plane surface joins the first edge of the second surface, wherein the second edge of the second surface joins the first edge of the third plane surface, and wherein the second edge of the third plane surface joins the edge of the fourth surface; and   the heat conductive member extending into the central opening of the supporting ring structure and thereby positioning the first plane surface adjacent the membrane, the third plane surface of the heat conductive member being formed and positioned to engage the supporting ring structure of the X-ray mask and position the membrane parallel with and Spaced from the first plane surface.