Inventor
NADEAU ROCK
US10 patents
⚠️ This page may combine multiple inventors who share the name “NADEAU ROCK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
9 patentsUS6334807B1Jan 1, 2002
Chemical mechanical polishing in-situ end point system
IBM113 citations97
US6319093B1Nov 20, 2001
Chemical-mechanical polishing system and method for integrated spin dry-film thickness measurement
IBM32 citations92
US6022266AFeb 8, 2000
In-situ pad conditioning process for CMP
IBM76 citations91
US5723874AMar 3, 1998
Dishing and erosion monitor structure for damascene metal processing
IBM22 citations88
US6340601B1Jan 22, 2002
Method for reworking copper metallurgy in semiconductor devices
IBM26 citations87
US5885135AMar 23, 1999
CMP wafer carrier for preferential polishing of a wafer
IBM32 citations87
US5663637ASep 2, 1997
Rotary signal coupling for chemical mechanical polishing endpoint detection with a westech tool
IBM41 citations87
US6579149B2Jun 17, 2003
Support and alignment device for enabling chemical mechanical polishing rinse and film measurements
IBM13 citations83
US6458020B1Oct 1, 2002
Slurry recirculation in chemical mechanical polishing
IBM15 citations78