Inventor
SHIMADA HIRONORI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “SHIMADA HIRONORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
9 patentsUSD939459SDec 28, 2021
Boat for wafer processing apparatus
KOKUSAI ELECTRIC CORP15 citations85
USD924953SJul 13, 2021
Gas inlet attachment for substrate processing apparatus
KOKUSAI ELECTRIC CORP6 citations83
US11555246B2Jan 17, 2023
Substrate processing apparatus and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP5 citations73
US11935762B2Mar 19, 2024
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
KOKUSAI ELECTRIC CORP3 citations72
US11015248B2May 25, 2021
Substrate processing apparatus and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP3 citations72
US11450536B2Sep 20, 2022
Substrate processing apparatus and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP2 citations71
USD1017561SMar 12, 2024
Nozzle holder of substrate processing apparatus
KOKUSAI ELECTRIC CORP0 citations61
US12518981B2Jan 6, 2026
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
KOKUSAI ELECTRIC CORP0 citations60
US12456636B2Oct 28, 2025
Heat insulation structure, substrate processing apparatus, method of manufacturing semiconductor device and substrate processing method
KOKUSAI ELECTRIC CORP0 citations51