USD924953SActiveUtility

Gas inlet attachment for substrate processing apparatus

54
Assignee: KOKUSAI ELECTRIC CORPPriority: Jul 19, 2018Filed: Dec 4, 2018Granted: Jul 13, 2021
Est. expiryJul 19, 2038(~12 yrs left)· nominal 20-yr term from priority
Inventors:Hironori Shimada
54
PatentIndex Score
6
Cited by
15
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       I claim the ornamental design for a gas inlet attachment for substrate processing apparatus, as shown and described.

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