Inventor · disambiguated record
Scott L. Light
Also filed as: LIGHT SCOTT · LIGHT SCOTT L
44 granted patents·6 pending applications·353 citations·filing 2000–2025
97Inventor score
Top patents by PatentIndex Score
50 records- 0197US6577379B1Method and apparatus for shaping and/or orienting radiation irradiating a microlithographic substrateMICRON TECHNOLOGY INC·Filed 2001·Granted Jun 10, 2003·96 cites·71 claims
- 0293US6905975B2Methods of forming patterned compositionsMICRON TECHNOLOGY INC·Filed 2003·Granted Jun 14, 2005·51 cites·44 claims
- 0392US8575032B2Methods of forming a pattern on a substrateLIGHT SCOTT L·Filed 2011·Granted Nov 5, 2013·16 cites·35 claims
- 0489US6784975B2Method and apparatus for irradiating a microlithographic substrateMICRON TECHNOLOGY INC·Filed 2001·Granted Aug 31, 2004·28 cites·70 claims
- 0588US6794100B2Method for controlling radiation beam intensity directed to microlithographic substratesMICRON TECHNOLOGY INC·Filed 2001·Granted Sep 21, 2004·27 cites·40 claims
- 0687US7038762B2Method and apparatus for irradiating a microlithographic substrateMICRON TECHNOLOGY INC·Filed 2004·Granted May 2, 2006·21 cites·22 claims
- 0786US6465141B2Method for improved lithographic critical dimension controlMICRON TECHNOLOGY INC·Filed 2001·Granted Oct 15, 2002·21 cites·16 claims
- 0885US11501804B2Microelectronic devices including semiconductive pillar structures, and related electronic systemsMICRON TECHNOLOGY INC·Filed 2020·Granted Nov 15, 2022·2 cites·25 claims
- 0985US8486611B2Semiconductor constructions and methods of forming patternsMILLWARD DAN·Filed 2010·Granted Jul 16, 2013·7 cites·16 claims
- 1083US8815497B2Semiconductor constructions and methods of forming patternsMICRON TECHNOLOGY INC·Filed 2013·Granted Aug 26, 2014·5 cites·24 claims
- 1183US6545829B1Method and device for improved lithographic critical dimension controlMICRON TECHNOLOGY INC·Filed 2000·Granted Apr 8, 2003·18 cites·17 claims
- 1282US11195838B2Arrays of capacitors, methods used in forming integrated circuitry, and methods used in forming an array of capacitorsMICRON TECHNOLOGY INC·Filed 2019·Granted Dec 7, 2021·2 cites·22 claims
- 1382US7046340B2Method and apparatus for controlling radiation beam intensity directed to microlithographic substratesMICRON TECHNOLOGY INC·Filed 2004·Granted May 16, 2006·16 cites·18 claims
- 1481US8440371B2Imaging devices, methods of forming same, and methods of forming semiconductor device structuresHE YUAN·Filed 2011·Granted May 14, 2013·3 cites·24 claims
- 1580US10522395B1Methods of forming a patternMICRON TECHNOLOGY INC·Filed 2018·Granted Dec 31, 2019·2 cites·17 claims
- 1680US7298453B2Method and apparatus for irradiating a microlithographic substrateMICRON TECHNOLOGY INC·Filed 2006·Granted Nov 20, 2007·4 cites·19 claims
- 1779US2025385177A1Microelectronic devices with staircased stadiums and both through-step and to-step contacts, and related systems and methodsMICRON TECHNOLOGY INC·Filed 2025·Application pending·0 cites
- 1878US8609302B2Lithography methods, methods for forming patterning tools and patterning toolsZHOU JIANMING·Filed 2011·Granted Dec 17, 2013·2 cites·17 claims
- 1975US9583381B2Methods for forming semiconductor devices and semiconductor device structuresMICRON TECHNOLOGY INC·Filed 2013·Granted Feb 28, 2017·3 cites·20 claims
- 2075US9213239B2Methods of forming patterns for semiconductor device structuresLIGHT SCOTT·Filed 2013·Granted Dec 15, 2015·4 cites·25 claims
- 2175US6538830B2Method and device for improved lithographic critical dimension controlMICRON TECHNOLOGY INC·Filed 2001·Granted Mar 25, 2003·12 cites·16 claims
- 2273US9153458B2Methods of forming a pattern on a substrateMICRON TECHNOLOGY INC·Filed 2013·Granted Oct 6, 2015·2 cites·26 claims
- 2373US8883372B2Reticle with composite polarizer and method of simultaneous optimization of imaging of a set of different patternsLIGHT SCOTT·Filed 2012·Granted Nov 11, 2014·2 cites·18 claims
- 2471US9330914B2Methods of forming line patterns in substratesMICRON TECHNOLOGY INC·Filed 2013·Granted May 3, 2016·2 cites·38 claims
- 2570US11515198B2Semiconductor constructions comprising dielectric material, and methods of forming dielectric fill within openings extending into semiconductor constructionsMICRON TECHNOLOGY INC·Filed 2020·Granted Nov 29, 2022·0 cites·34 claims
- 2669US8969214B2Methods of forming a pattern on a substrateMICRON TECHNOLOGY INC·Filed 2013·Granted Mar 3, 2015·2 cites·21 claims
- 2769US8507191B2Methods of forming a patterned, silicon-enriched developable antireflective material and semiconductor device structures including the sameMILLWARD DAN B·Filed 2011·Granted Aug 13, 2013·2 cites·31 claims
- 2866US8625078B2Illumination design for lens heating mitigationZHOU JIANMING·Filed 2011·Granted Jan 7, 2014·1 cites·6 claims
- 2965US12394711B2Microelectronic devices with staircased stadiums and both through-step and to-step contacts, and related systems and methodsMICRON TECHNOLOGY INC·Filed 2022·Granted Aug 19, 2025·0 cites·22 claims
- 3063US2024349478A1Methods of forming microelectronic devices, and related microelectronic devices, memory devices, and electronic systemsMICRON TECHNOLOGY INC·Filed 2024·Application pending·0 cites
- 3162US10763155B2Semiconductor constructions comprising dielectric material, and methods of forming dielectric fill within openings extending into semiconductor constructionsMICRON TECHNOLOGY INC·Filed 2018·Granted Sep 1, 2020·0 cites·18 claims
- 3261US10998224B2Semiconductor devices comprising conductive patterns of varying dimensions and related systemsMICRON TECHNOLOGY INC·Filed 2019·Granted May 4, 2021·0 cites·18 claims
- 3361US8889558B2Methods of forming a pattern on a substrateMICRON TECHNOLOGY INC·Filed 2012·Granted Nov 18, 2014·1 cites·48 claims
- 3459US9176385B2Lithography methods, methods for forming patterning tools and patterning toolsMICRON TECHNOLOGY INC·Filed 2013·Granted Nov 3, 2015·0 cites·19 claims
- 3557US10153195B1Semiconductor constructions comprising dielectric materialMICRON TECHNOLOGY INC·Filed 2017·Granted Dec 11, 2018·0 cites·11 claims
- 3657US2015015860A1Reticles, And Methods Of Mitigating Asymmetric Lens Heating In PhotolithographyMICRON TECHNOLOGY INC·Filed 2014·Application pending·0 cites
- 3756US2014247476A1Lithography wave-front control system and methodMICRON TECHNOLOGY INC·Filed 2014·Application pending·0 cites
- 3855US11812603B2Microelectronic devices including semiconductive pillar structures, and related electronic systemsMICRON TECHNOLOGY INC·Filed 2020·Granted Nov 7, 2023·0 cites·20 claims
- 3954US2024074194A1Memory device including staircase structures and adjacent trench structuresMICRON TECHNOLOGY INC·Filed 2023·Application pending·0 cites
- 4053US9140977B2Imaging devices, methods of forming same, and methods of forming semiconductor device structuresMICRON TECHNOLOGY INC·Filed 2013·Granted Sep 22, 2015·0 cites·20 claims
- 4151US8845908B2Reticles, and methods of mitigating asymmetric lens heating in photolithographyLIGHT SCOTT L·Filed 2010·Granted Sep 30, 2014·0 cites·24 claims
- 4251US8736814B2Lithography wave-front control system and methodHE YUAN·Filed 2011·Granted May 27, 2014·0 cites·23 claims
- 4349US12022647B2Microelectronic devices including memory cell structures, and related methods and electronic systemsMICRON TECHNOLOGY INC·Filed 2021·Granted Jun 25, 2024·0 cites·33 claims
- 4449US11158571B2Devices including conductive interconnect structures, related electronic systems, and related methodsMICRON TECHNOLOGY INC·Filed 2018·Granted Oct 26, 2021·0 cites·24 claims
- 4549US9465287B2Methods of forming patterns for semiconductor device structuresMICRON TECHNOLOGY INC·Filed 2015·Granted Oct 11, 2016·0 cites·17 claims
- 4645US8658336B2Methods of correcting for variation across substrates during photolithographyHE YUAN·Filed 2012·Granted Feb 25, 2014·0 cites·21 claims
- 4744US7230679B2Method and apparatus for controlling radiation beam intensity directed to microlithographic substratesMICRON TECHNOLOGY INC·Filed 2006·Granted Jun 12, 2007·1 cites·27 claims
- 4843US9235134B2Lens heating compensation in photolithographyHE YUAN·Filed 2010·Granted Jan 12, 2016·0 cites·21 claims
- 4943US2005233588A1Semiconductor constructionsBOETTIGER ULRICH C·Filed 2005·Application pending·0 cites
- 5042US8728721B2Methods of processing substratesLIGHT SCOTT L·Filed 2011·Granted May 20, 2014·0 cites·12 claims
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