P

Inventor

FLANNER III PHILIP D

US7 patents
⚠️ This page may combine multiple inventors who share the name “FLANNER III PHILIP D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

3 patents
US7362686B1Apr 22, 2008

Film measurement using reflectance computation

KLA TENCOR TECH CORP7 citations72
US7345761B1Mar 18, 2008

Film measurement

KLA TENCOR TECH CORP3 citations61
US7190453B1Mar 13, 2007

Film measurement

KLA TENCOR TECH CORP5 citations61

KLA TENCOR CORP

2 patents
US8711349B2Apr 29, 2014

High throughput thin film characterization and defect detection

KLA TENCOR CORP8 citations80
US10079183B2Sep 18, 2018

Calculated electrical performance metrics for process monitoring and yield management

KLA TENCOR CORP3 citations69

TENCOR INSTRUMENTS

1 patent
US5581350ADec 3, 1996

Method and system for calibrating an ellipsometer

TENCOR INSTRUMENTS162 citations94

ILORETA JONATHAN

1 patent
US9127927B2Sep 8, 2015

Techniques for optimized scatterometry

ILORETA JONATHAN5 citations63