US7345761B1ExpiredUtility

Film measurement

60
Assignee: KLA TENCOR TECH CORPPriority: Sep 20, 2004Filed: Sep 20, 2004Granted: Mar 18, 2008
Est. expirySep 20, 2024(expired)· nominal 20-yr term from priority
Inventors:Paul AoyagiPhilip D. Flanner, IiiLeonid Poslavsky
G01N 21/8422G01B 11/0625G01N 21/211
60
PatentIndex Score
3
Cited by
5
References
20
Claims

Abstract

A method of determining actual properties of layered media. An incident beam of light is directed towards the layered media, such that the incident beam of light is reflected from the layered media as a reflected beam of light. The actual properties of the reflected beam of light are measured, and properties of the layered media are estimated. A mathematical model of the layered media is solved with the estimated properties of the layered media to yield theoretical properties of the reflected beam of light. The mathematical model is solved using at least one of a modified T matrix algorithm and a Z matrix algorithm. The theoretical properties of the reflected beam of light are compared to the actual properties of the reflected beam of light to yield a cost function. The estimated properties of the layered media are iteratively adjusted and the mathematical model is iteratively solved until the cost function is within a desired tolerance. The estimated properties of the layered media are reported as the actual properties of the layered media.

Claims

exact text as granted — not AI-modified
1. A method of determining actual properties of layered media, the method comprising the steps of:
 directing an incident beam of light towards the layered media, such that the incident beam of light is reflected from the layered media as a reflected beam of light, 
 measuring actual properties of the reflected beam of light, 
 estimating properties of the layered media, 
 solving a mathematical model of the layered media with the estimated properties of the layered media to yield theoretical properties of the reflected beam of light, where the mathematical model is solved using at least one of a modified T matrix algorithm and a Z matrix algorithm, 
 comparing the theoretical properties of the reflected beam of light to the actual properties of the reflected beam of light to yield a cost function, 
 iteratively adjusting the estimated properties of the layered media and solving the mathematical model until the cost function is within a desired tolerance, and 
 reporting the estimated properties of the layered media as the actual properties of the layered media. 
 
   
   
     2. The method of  claim 1 , wherein the method is implemented in an ellipsometer. 
   
   
     3. The method of  claim 1 , wherein the layered media comprises layers of more than one material. 
   
   
     4. The method of  claim 1 , wherein the layered media comprises more than one layer. 
   
   
     5. The method of  claim 1 , wherein the layered media includes a grating layer. 
   
   
     6. The method of  claim 1 , wherein the actual properties of the layered media include at least one of layer thickness and layer refractive index. 
   
   
     7. The method of  claim 1 , wherein the mathematical model is computationally solved at least partially using a Z matrix algorithm. 
   
   
     8. The method of  claim 1 , wherein the mathematical model is computationally solved at least partially using a modified T matrix algorithm. 
   
   
     9. The method of  claim 1 , wherein the mathematical model is a reflectance model that is derived using rigorous coupled wave analysis. 
   
   
     10. The method of  claim 1 , wherein the one of the Z matrix algorithm and the modified T matrix algorithm are used to compute a reflectance of the layered media. 
   
   
     11. The method of  claim 1 , wherein the method is implemented in a scatterometer. 
   
   
     12. The method of  claim 1 , wherein the layered media comprises a film stack on a semiconducting substrate. 
   
   
     13. The method of  claim 1 , wherein the modified T matrix is used in combination with at least one of an S matrix algorithm and an R matrix algorithm. 
   
   
     14. The method of  claim 1 , wherein the Z matrix is used in combination with at least one of an S matrix algorithm and an R matrix algorithm. 
   
   
     15. The method of  claim 1 , wherein the modified T matrix algorithm is characterized by:
     R   B,j =( P′   (2,1),j ( P   (1,1),j−1   +P   (1,2),j−1   R   T,j−1 )+ P′   (2,2),j ( P   (2,1),j−1   +P   (2,2),j−1   R   T,j−1 ))× 
   ( P′   (1,1),j ( P   (1,1),j−1   +P   (1,2),j−1   R   T,j−1 )+ P′   (1,2),j ( T   (2,1),j−1   +P   (2,2),j−1   R   T,j−1 )) −1    
     R   T,j   =S   (2,2),j   R   B,j   X   (1,1),j   −1 . 
 
   
   
     16. The method of  claim 1 , wherein the Z matrix algorithm is characterized by:
     R   B,j ( P′   (2,1),j   Z   j−1   +P′   (2,2),j )( P′   (1,1),j   Z   j−1   +P′   (1,2),j ) −1    
     R   T,j   =X   (2,2),j   R   B,j   X   (1,1),j   −1    
     Z   j =( P   (1,1),j   +P   (1,2),j   R   T,j )( P   (2,1),j   +P   (2,2),j   R   T,j ) −1 . 
 
   
   
     17. A method of determining a reflectance of a layered media by iteratively solving a mathematical model of the layered media with estimated properties of the layered media, where the mathematical model is solved using at least one of a modified T matrix algorithm and a Z matrix algorithm, producing a reflectance value indicative of the reflectance of the layered media. 
   
   
     18. The method of  claim 17 , wherein the method is implemented in an ellipsometer. 
   
   
     19. A method of determining actual properties of layered media having more than one layer and layers of more than one material and including a grating layer on a semiconducting substrate, the method comprising the steps of:
 directing an incident beam of light towards the layered media, such that the incident beam of light is reflected from the layered media as a reflected beam of light, 
 measuring actual properties of the reflected beam of light, including at least one of layer thickness and layer refractive index, 
 estimating properties of the layered media, 
 solving a mathematical model of the layered media with the estimated properties of the layered media to yield theoretical properties of the reflected beam of light, where the mathematical model is solved using at least one of a modified T matrix algorithm and a Z matrix algorithm, wherein the mathematical model is a reflectance model that is derived using rigorous coupled wave analysis, 
 comparing the theoretical properties of the reflected beam of light to the actual properties of the reflected beam of light to yield a cost function, 
 iteratively adjusting the estimated properties of the layered media and solving the mathematical model until the cost function is within a desired tolerance, and 
 reporting the estimated properties of the layered media as the actual properties of the layered media. 
 
   
   
     20. The method of  claim 19 , wherein the method is implemented in an ellipsometer.

Cited by (0)

No later patents cite this yet.

References (0)

No backward citations on record.